Separable Crossbeam Shadow Frame for Thermal Stability
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Solution Overview
Problem
Large-sized shadow frames for substrate processing face issues related to processing ability, manufacturability, and tight tolerances, leading to deformity and arcing due to heat and thermal expansion.
Innovation Solution
A shadow frame design incorporating a separable cross-center beam with fastening mechanisms, a shadow frame body, and a cover plate, made from materials like aluminum or ceramics, to maintain planarity and reduce arcing, while allowing for easier manufacturing and improved tolerance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large-sized shadow frame is used for substrate processing, then the substrate processing area is increased, but the shadow frame experiences deformity and arcing due to heat and thermal expansion
Solution Approach 1:
The shadow frame is divided into multiple segments that can be assembled together, allowing each segment to be smaller and more stable individually while collectively providing the required large processing area. This segmentation reduces thermal expansion issues and maintains structural integrity under heat.
Solution Approach 2:
The shadow frame utilizes composite material construction combining different materials with complementary properties - such as combining thermally stable materials with conductive materials - to achieve both thermal resistance and electrical conductivity, preventing arcing while maintaining stability under thermal stress.
2Area of stationary object
If a large-sized shadow frame is used for substrate processing, then the substrate processing area is increased, but manufacturing becomes more difficult and tolerances become tighter
Solution Approach 1:
The shadow frame is segmented into multiple manageable components that can be manufactured separately using standard manufacturing processes, then assembled together. This reduces the complexity of manufacturing each individual component and allows for better quality control and tighter tolerances on smaller parts compared to a single large piece.
Solution Approach 2:
The design transitions from a two-dimensional flat structure to a three-dimensional assembled structure with multiple layers and components. This dimensional change allows for better manufacturing by enabling precision machining and assembly of individual components rather than attempting to manufacture a single large complex piece.
3Strength
If a solid center beam is used in the shadow frame, then structural strength is improved, but manufacturing complexity and tolerance requirements increase
Solution Approach 1:
The center beam is segmented into multiple sections that can be manufactured separately and then joined together. This segmentation reduces the complexity of manufacturing each section while maintaining the overall structural strength through proper joining mechanisms. It also facilitates better tolerance control on individual sections.
Solution Approach 2:
The center beam design incorporates local quality variations where different sections have different properties or configurations optimized for their specific functions. This allows for reduced complexity in manufacturing individual sections while maintaining overall strength through strategically placed reinforcement or connection points.
Data Source
AI summary
The present disclose generally relates to a shadow frame having a cross center beam for improved processing ability, manufacturability, and tolerance. In one embodiment, a shadow frame comprises a center beam with one or more surfaces for receiving one or more fastening mechanisms, a shadow frame body coupled to the center beam, the shadow frame body having a top surface, a bottom surface, and a plurality of side surfaces, the top surface having a cavity therein for receiving the center beam, and one or more fastening mechanisms coupled with the center beam and the shadow frame body.