Shadow Mask Laser Patterning Heat Dissipation

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Solution Overview

Problem

The existing methods for manufacturing shadow masks using laser beams face challenges in heat dissipation, leading to overheating and potential thermal deformations due to non-uniform heat distribution, which affects the precision and efficiency of the patterning process.

Innovation Solution

A mask manufacturing apparatus incorporating a laser irradiation part, a stage, a frame, and a heat discharge sheet that absorbs and dissipates heat generated during the laser beam process, utilizing a magnetic material to secure the shadow mask and enhance heat transfer, along with a heat transfer medium for indirect conduction, to prevent overheating and improve patterning speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If laser beam process is used to manufacture shadow mask, then patterning precision is improved, but heat accumulation causes overheating and thermal deformation

Engineering Contradiction:

Improvepatterning precisionVSAvoidheat accumulation

Core Design Contradiction:

Manufacturing precisionVSTemperature

Solution Approach 1:

A heat discharge sheet is introduced as an intermediary component between the shadow mask and the laser irradiation source. This sheet actively manages heat transfer, serving as a mediator that conducts away excess heat while allowing the laser patterning process to continue with high precision without thermal deformation of the mask.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful heat energy is extracted from the shadow mask system by introducing the heat discharge sheet. The sheet selectively removes excess heat generated during laser irradiation, separating the useful patterning function from the harmful thermal effect, thereby maintaining precision while preventing overheating.

Inventive Principle:

Principle #2Taking out (Extraction)

2Productivity

If laser beam intensity is increased to shorten patterning time, then productivity is improved, but heat generation increases causing overheating

Engineering Contradiction:

Improvepatterning speedVSAvoidheat generation

Core Design Contradiction:

ProductivityVSTemperature

Solution Approach 1:

The heat discharge sheet acts as a thermal intermediary that enables the use of higher laser intensities for faster patterning. By managing the heat transfer pathway, the sheet allows increased productivity through higher beam intensity while preventing the proportional increase in heat accumulation that would otherwise cause overheating.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The excessive heat generated by high-intensity laser beams, which would normally be a harmful byproduct limiting productivity, is converted into a manageable thermal flow. The heat discharge sheet directs this thermal energy away from the mask, transforming the harmful heat into a controlled process parameter that enables faster patterning without thermal damage.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Ease of manufacture

If wet etching process is used to manufacture shadow mask, then ease of manufacture is improved, but patterning precision deteriorates due to non-uniform etching

Engineering Contradiction:

Improveease of manufactureVSAvoidpatterning precision

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The chemical wet etching process is replaced with a laser-based mechanical/photonic ablation process. This substitution eliminates the non-uniformity inherent in chemical etching while achieving precise patterning through controlled laser energy delivery, with the heat discharge sheet managing the thermal byproduct of the new process.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively dissipates heat, preventing overheating and allowing for increased laser beam intensity, thereby shortening the time required to form patterns on the shadow mask while maintaining precision and preventing thermal deformations.

Implementation Method 1

The shadow mask can be manufactured using the laser beam process or laser ablation process

Methodology Applied

Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The heat discharge sheet makes contact with the shadow mask material and absorbs a heat generated from the shadow mask material to discharge or dissipate the heat to surroundings of the shadow mask material

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS9377681B2Mask manufacturing apparatus and method of manufacturing mask using laser beam

Publication Date: 2016.06.28 SAMSUNG DISPLAY CO LTD

AI summary

A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.