High Aspect Ratio Shadow Mask for Microelectrode Arrays

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Solution Overview

Problem

Current microelectrode arrays face manufacturing difficulties due to their small scale, limiting the number of electrodes that can be placed, resulting in neurons along adjacent sides of electrode projections not being detected or stimulated effectively.

Innovation Solution

A high aspect ratio shadow mask is used to facilitate the manufacture of microelectrode arrays with multiple electrodes oriented at various locations, featuring a substantially planar base layer and hollow projections with openings that define trace deposition patterns, allowing for the deposition of conductive pathways along the sides of microneedles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single electrode is oriented at the tip of each projection in the array, then manufacturing is simplified, but the number of electrodes that can be placed on each projection is limited

Engineering Contradiction:

Improveease of manufactureVSAvoidnumber of electrodes

Core Design Contradiction:

Ease of manufactureVSQuantity of substance

Solution Approach 1:

The single electrode at the tip is segmented into multiple electrodes distributed along the projection. The projection surface is divided into multiple electrode locations, allowing independent electrodes to be placed at different positions (tip, sides, base) rather than concentrating all electrodes at the tip, thereby increasing the number of electrodes per projection while maintaining manufacturing simplicity through the shadow mask technique

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The electrode distribution transitions from a single-point location (tip only) to a multi-dimensional distribution along the projection structure. By utilizing the lateral dimensions of the projection and placing electrodes at various heights and angular positions, the system increases electrode capacity without complicating the manufacturing process

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Reliability

If electrodes are placed only at the tip of each projection, then electrical isolation between electrodes is maintained, but neurons along adjacent sides of the projections are not detected or stimulated

Engineering Contradiction:

Improveelectrical isolationVSAvoidneuron detection coverage

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

Different regions of the projection are assigned different electrode locations to serve different functional zones. The tip electrodes detect/stimulate deep neurons, while side and base electrodes detect/stimulate neurons along adjacent sides. Each local region has optimized electrode placement for its specific detection target, maintaining electrical isolation while expanding overall coverage

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

Multiple electrodes are nested along the projection structure at different positions (tip, sides, base). The projection acts as a nested container holding multiple electrodes at hierarchical levels, allowing simultaneous electrical isolation of each electrode while achieving comprehensive neuronal coverage through the nested arrangement

Inventive Principle:

Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of microelectrode arrays with increased electrode density, allowing for the stimulation and detection of neurons along the sides of microneedles, thereby enhancing the efficacy of signal transmission and reception.

Implementation Method 1

conformally depositing or placing a shadow mask layer of material on top of the high aspect ratio electrode array structure

Methodology Applied

Scientific EffectConformal deposition: Deposition (physical)

Implementation Method 2

the step of removing the high aspect ratio structure from the shadow mask layer can include dissolving or detaching the high aspect ratio structure

Methodology Applied

Scientific EffectDissolution: Solvation

Implementation Method 3

depositing trace deposition materials over the high aspect ratio shadow mask, wherein the deposited trace deposition materials penetrate through the plurality of openings along the hollow projections to form an electrode pattern

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS10172558B2Structure and methodology for a shadow mask having hollow high aspect ratio projections

Publication Date: 2019.01.08 UNIVESRITY OF UTAH RES FOUND

AI summary

A high aspect ratio shadow mask and a method of making and using the high aspect ratio shadow mask can provide multiple conductive trace pathways along high aspect ratio electrodes. The high aspect ratio shadow mask can include a substantially planar base layer and a plurality of hollow high aspect ratio projections extending from the substantially planar base layer. The high aspect ratio shadow mask can further include a plurality of openings along the hollow projections which define trace deposition patterns.