Shadow Maskless Deposition Apparatus for OLED Manufacturing
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Solution Overview
Problem
The existing deposition methods for organic light emitting display devices (OLEDDs) face challenges with large-scale fine metal masks (FMMs, which warp due to weight, leading to precision issues and increased manufacturing time, as well as inefficiencies in aligning and separating these masks from substrates.
Innovation Solution
A deposition apparatus featuring a transporting unit with first and second transporting units for cyclic reuse of moving units, a loading unit for substrate fixation, a deposition unit with deposition assemblies kept at a predetermined distance from substrates, and an unloading unit for efficient detachment, along with stockers for accommodating and replacing defective moving units, allowing continuous processing without the need for repressurizing the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large-scale FMM is used to manufacture large-scaled organic light emitting display apparatus, then the display apparatus can be produced on a large scale, but the FMM warps due to its own weight making it difficult to form an intermediate layer with precise pattern
Solution Approach 1:
The patent replaces the mechanical contact-based FMM deposition system with a shadow maskless deposition system. Instead of using a physical FMM that contacts the substrate, the invention uses a light source and a shadow maskless pattern formation method where material is deposited through a defined area without direct mechanical contact, eliminating warping issues while maintaining large substrate compatibility
Solution Approach 2:
The invention extracts and removes the FMM component from the deposition system. By eliminating the FMM entirely, the system avoids the warping problem caused by the mask's weight while still achieving patterned deposition through alternative means (shadow maskless method with defined deposition area)
2Area of stationary object
If a large-scale FMM is used, then large-scaled display apparatus can be manufactured, but significant time is wasted for aligning and closely-attaching the FMM to the substrate and for separating them after deposition
Solution Approach 1:
The invention removes the FMM component from the process, eliminating the time-consuming alignment and attachment steps. The shadow maskless deposition system allows direct deposition onto the substrate without requiring a physical mask to be positioned or removed
Solution Approach 2:
The shadow maskless deposition system enables continuous deposition operation without interruption for mask handling. The process maintains continuous useful action by eliminating the discrete steps of mask attachment, alignment, and removal that interrupt the deposition workflow
3Manufacturing precision
If a FMM is used for deposition, then intermediate layer can be formed with pattern, but the FMM must be closely attached to the substrate which increases manufacturing complexity
Solution Approach 1:
The invention extracts and eliminates the FMM and its associated attachment system. The shadow maskless deposition method achieves patterned intermediate layer formation without requiring any mask attachment mechanism, thereby reducing device complexity while maintaining patterning capability
Solution Approach 2:
The patent replaces the mechanical mask attachment system with a shadow maskless deposition approach. Instead of mechanically attaching a mask to the substrate, the system uses controlled material deposition in a defined area to achieve the same patterning effect without mechanical complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces maintenance and repair times, enabling efficient mass production of OLEDDs by maintaining consistent conditions for all substrates and allowing for quick replacement of defective units without interrupting the production process.
Implementation Method 1
deposition assemblies, which are kept a predetermined distance apart from the substrates and are configured to deposit corresponding material layers onto the substrates
Data Source
AI summary
A deposition apparatus includes a first transporting unit configured to transport moving units, to which substrates may be detachably affixed, in a first direction; and a second transporting unit configured to transport empty moving units, from which the respective substrates have been detached, in a return direction opposite to the first direction, wherein the moving units are transported cyclically in reusing fashion.