Shadow Moiré Topside Infrared Heating Warpage

The heating system is divided into multiple independent heating zones (first heating zone, second heating zone, third heating zone, fourth heating zone) with separate control. This segmentation allows each zone to be optimized for uniform temperature distribution across the entire sample area, eliminating the temperature non-uniformity problem of single-zone convection heating while maintaining large sample area capability.

Different heating zones are applied to different regions of the sample (top/bottom and inner/outer zones) with independently controllable heating parameters. This local quality approach ensures that each region receives appropriate heating to maintain overall temperature uniformity across the large sample area, resolving the contradiction between heating capability and temperature uniformity.

The heating function is segmented into multiple zones that can operate at optimized air flow speeds independently. This allows the system to maintain heating efficiency without requiring high overall air flow speed that would cause sample instability, as each zone contributes to heating without creating destabilizing forces.

The system replaces pure convection heating with a combination of radiative heating elements and controlled convection. This substitution reduces reliance on high-speed air flow for heating, thereby maintaining heating efficiency while minimizing airflow-induced sample instability and flutter.

The large measurement area is divided into multiple heating zones with independent control. This segmentation enables the system to maintain temperature uniformity across extended areas (beyond 70 mm diameter) by locally optimizing heating in each zone, thereby allowing increased productivity through larger sample areas without sacrificing temperature uniformity.

Each region of the expanded measurement area receives tailored heating through its designated heating zone. This local quality approach ensures that temperature uniformity is maintained across the entire large area, enabling high productivity with extended measurement capabilities while avoiding the temperature non-uniformity that plagues conventional convection systems.

The heating system is segmented into multiple zones with independent control, directly achieving temperature uniformity across the sample area. While this increases device complexity, the segmentation enables precise temperature management that was impossible with single-zone systems, representing an acceptable trade-off for achieving the required temperature uniformity.

The implementation of locally controlled heating zones improves temperature uniformity by allowing independent optimization of each region. The increased device complexity from multiple control systems is justified by the significant improvement in temperature uniformity, which is critical for accurate warpage measurement across large sample areas.