Shaft-Equipped Heater Unit Cold Spray Joining
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Solution Overview
Problem
The joining of different materials with varying thermal expansion coefficients in shaft-equipped heater units for semiconductor substrates leads to distortion and interfacial delamination or cracking due to high joining temperatures and constraints on material selection.
Innovation Solution
A shaft-equipped heater unit is designed with a heater plate of high thermal conductivity material and a shaft of lower thermal conductivity material, where the shaft is formed by spraying material powder onto the heater plate at a temperature below the melting point using compressed gas, and includes a heat-conduction suppressor such as a groove or cooling medium channel to reduce heat transfer and prevent delamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If different materials are joined by brazing to suppress heat conduction to the shaft, then heat conduction to the shaft is suppressed, but distortion occurs due to difference in thermal expansion and interfacial delamination or crack occurs
Solution Approach 1:
The invention changes the joining temperature parameter from high temperature (brazing) to low temperature (cold spray), avoiding thermal expansion differences that cause distortion and cracking while still achieving material joining and heat conduction suppression
Solution Approach 2:
The invention replaces the thermal joining process (brazing) with a mechanical/cold spray process, eliminating the need for high temperature heating that causes thermal expansion issues while achieving secure material attachment
2Ease of manufacture
If brazing is used to join different materials, then joining is achieved, but constraints on material selection arise due to melting point and joining temperature requirements
Solution Approach 1:
The invention changes the joining temperature parameter to below the melting point of the material powder, enabling the use of diverse materials including those with low melting points that cannot be used in traditional brazing processes
Solution Approach 2:
The invention replaces thermal joining with cold spray technology, removing the constraint of melting point requirements and enabling broader material selection flexibility
3Use of energy by moving object
If high thermal conductivity material is used for the heater plate, then heating efficiency is improved, but heat conduction to the shaft increases causing temperature distribution issues
Solution Approach 1:
The invention applies local quality by creating a heat conduction suppressor structure at the specific location where the shaft contacts the heater plate, allowing the overall heater plate to maintain high thermal conductivity while the local area suppresses heat conduction to the shaft
Solution Approach 2:
The invention uses composite structures by combining high thermal conductivity heater plate material with a heat conduction suppressor made of lower thermal conductivity material or air-filled groove, creating a composite system that achieves both heating efficiency and temperature distribution uniformity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for improved temperature distribution and prevents distortion, delamination, and cracking by enabling the use of materials difficult to join by brazing, while maintaining uniform heating and extending equipment lifespan.
Implementation Method 1
spraying material powder which constitutes the shaft on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas
Implementation Method 2
the shaft comprises a heat-conduction suppressor that suppresses heat conduction from the heater plate to the shaft
Data Source
AI summary
A shaft-equipped heater unit includes a heater plate that heats an object to be heated placed thereon, and a shaft part that supports the heater plate, wherein the shaft part is formed by spraying material powder which constitutes the shaft part on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas.