Rotating Shaft Sealing Structure for Low-Vibration Vacuum Processing

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Solution Overview

Problem

Existing rotating shaft sealing devices in semiconductor substrate processing apparatuses face challenges in preventing leakage of foreign substances and minimizing vibration, while also requiring additional lubrication and not being compact in design.

Innovation Solution

A rotating shaft sealing device with a hollow housing, a rotating shaft, a bearing, and a sealing unit comprising multiple seals made of plastic materials, including vacuum seals and elastic seals with higher elasticity, arranged serially to prevent foreign substance flow and vibration, along with a power transfer unit and a labyrinth seal to maintain vacuum and prevent particle flow, and a cooling water jacket for temperature control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a seal is provided between the housing and the rotating shaft, then leakage of foreign substances is prevented, but friction is caused between the rotating shaft and the seal

Engineering Contradiction:

Improvesealing performanceVSAvoidfriction

Core Design Contradiction:

ReliabilityVSForce

Solution Approach 1:

The sealing function is divided into multiple seals arranged in series along the rotating shaft, with each seal handling a portion of the sealing task. This segmentation reduces the friction burden on any single seal while maintaining overall sealing effectiveness.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent uses flexible seal elements that can deform to maintain contact with the rotating shaft surface, providing effective sealing through elastic deformation rather than rigid mechanical contact, thereby reducing friction.

Inventive Principle:

Principle #30Flexible shells and thin films

2Reliability

If multiple seals are arranged in the housing, then sealing performance is improved, but device complexity increases

Engineering Contradiction:

Improvesealing performanceVSAvoidsealing unit structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Multiple seals are integrated into a single sealing unit assembly that is installed as one component in the housing. This merging approach maintains the sealing benefits of multiple seals while simplifying installation and reducing overall device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The sealing unit is designed as a multi-functional component that simultaneously provides sealing, support, and alignment functions for the rotating shaft, reducing the need for separate components and simplifying the overall device structure.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Stability of the object's composition

If elastic seals with higher elasticity are used, then vibration is reduced, but the seals wear faster in high-temperature environments

Engineering Contradiction:

ImprovevibrationVSAvoidseal lifetime

Core Design Contradiction:

Stability of the object's compositionVSDuration of action of stationary object

Solution Approach 1:

The seals are made from composite materials that combine elastic properties for vibration reduction with heat-resistant characteristics. This composite approach allows the seals to maintain their elastic functionality while withstanding high-temperature environments and extending their service life.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The patent optimizes the elastic properties and material parameters of the seals to achieve a balance between vibration reduction and heat resistance. By carefully selecting material parameters, the seals can provide sufficient elasticity for vibration damping while maintaining durability in high-temperature conditions.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution minimizes vibration and prevents foreign substance leakage, eliminates the need for additional lubrication, and maintains a compact structure, ensuring effective sealing and extended seal lifetime in high-temperature environments.

Implementation Method 1

at least one elastic seal supporting the rotating shaft and reducing vibration

Methodology Applied

Scientific EffectElasticity: Elasticity

Implementation Method 2

a cooling water jacket for temperature control

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS11764102B2Rotating shaft sealing device and processing apparatus for semiconductor substrate using the same

Publication Date: 2023.09.19 SEALINK

AI summary

Provided is a rotating shaft sealing device. The rotating shaft sealing device mounted in a semiconductor substrate processing apparatus that processes a semiconductor substrate while rotating a semiconductor loading unit accommodating the semiconductor substrate, includes: a housing that is hollow and mounted in the semiconductor substrate processing apparatus; a rotating shaft accommodated in the housing and connected to the semiconductor loading unit to transfer a rotational force to the semiconductor loading unit; a bearing rotatably supporting the rotating shaft in the housing; a sealing unit including a plurality of seals arranged in the housing to tightly seal a gap between the housing and the rotating shaft; and a power transfer unit mounted at an end of the rotating shaft to transfer a rotational force to the rotating shaft.