Shape Calculation Device for Complex Periodic Structures
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Solution Overview
Problem
Existing small angle X-ray scattering devices struggle to accurately measure the shape of patterns with complex, partially constrained structures due to the inability to match the actual pattern with a virtually set periodic structure, leading to inaccuracies in shape measurement.
Innovation Solution
A shape calculation program that extracts and fits scattering profiles from both actual and virtually set periodic structures, using a shape calculation device with modules for profile extraction, simulation, and fitting to determine the shape parameters of the pattern, allowing for precise measurement of periodic structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a simplified periodic structure is virtually set based on expected structure, then the measurement process becomes simpler and faster, but the measurement precision deteriorates when there is a large difference between the virtual periodic structure and the actual complicated structure
Solution Approach 1:
The patent applies dynamics by making the virtual periodic structure adjustable and adaptable rather than fixed. The system dynamically modifies the virtual structure parameters (such as pitch, width, height) to match the actual complicated structure being measured. This allows the measurement system to adapt to different pattern complexities while maintaining both speed and accuracy, resolving the contradiction between simplified measurement processes and precise measurement results.
2Ease of manufacture
If a virtually set periodic structure is used for measurement, then the measurement process is simplified, but the reliability of measurement results deteriorates when the actual pattern has a complicated structure that cannot be matched
Solution Approach 1:
The patent employs parameter changes by systematically varying the parameters of the virtual periodic structure (pitch, width, height, shape) to achieve optimal matching with the actual complicated structure. The measurement system adjusts these parameters based on the specific characteristics of the pattern being measured, allowing the simplified measurement process to remain effective while improving reliability for complex structures through parameter optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables high-accuracy shape measurement of patterns by minimizing fitting residuals and accurately determining shape parameters, even in cases where the actual and virtual structures differ significantly.
Implementation Method 1
A small angle X-ray scattering device using small angle X-ray scattering (SAXS) has been developed as one of pattern shape measurement devices
Data Source
AI summary
According to one embodiment, a recording medium records a shape calculation program that causes a computer to calculate a shape of a periodic structure. The shape calculation program causes the computer to extract a second scattering profile from a first scattering profile obtained when the electromagnetic waves are incident and to extract a fourth scattering profile from a third scattering profile calculated using a second periodic structure that is virtually set. The shape calculation program causes the computer to perform fitting between the second scattering profile and the fourth scattering profile and to calculate the shape of the first periodic structure on the basis of the result of the fitting.