Shape Measurement System Speckle Noise Correction

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Solution Overview

Problem

The measurement accuracy of a target object's shape is compromised due to noise from the positional relationship between the measurement device and the object, particularly when a rough surface is inclined, leading to high repetitive reproducibility errors caused by speckles generated by laser light.

Innovation Solution

A shape measuring system that includes a distance measuring head, a distance measuring device, and a control device to analyze the distance detection waveform, calculate feature amounts, and perform correction or reliability weighting to improve measurement accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If laser light is used to measure the shape of a rough inclined surface, then non-contact measurement is achieved, but speckle noise causes measurement errors with high repetitive reproducibility

Engineering Contradiction:
Improveshape measurement accuracyVSAvoidspeckle noise
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies periodic action by performing multiple measurements at the same location and combining the results. The measurement process is repeated multiple times, and the final measurement value is determined through statistical processing of these periodic measurements, which reduces the impact of speckle noise while maintaining measurement efficiency.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent changes the parameter of measurement timing by performing measurements at different time points. Since speckle patterns change randomly over time, taking measurements at multiple time points and combining them statistically reduces the influence of speckle noise, thereby improving measurement accuracy without requiring additional hardware.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If multiple measurements are performed with reliability weighting, then measurement accuracy improves, but measurement time increases

Engineering Contradiction:
Improvemeasurement data accuracyVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies partial action by performing a limited number of repeated measurements (not excessive) and using statistical processing to obtain the final result. This approach achieves sufficient accuracy improvement without requiring an excessive number of measurements, thus balancing measurement accuracy with time efficiency.

Inventive Principle:
Principle #16Partial or excessive action

3Measurement precision

If the beam diameter of laser light is reduced to improve spatial resolution, then measurement detail improves, but measurement error due to inclination increases

Engineering Contradiction:
Improvespatial resolutionVSAvoidmeasurement error
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent changes the parameter of beam diameter dynamically. By adjusting the beam diameter according to the inclination angle of the measurement surface, the system maintains optimal measurement conditions: smaller beam diameter for steep inclines to reduce error, and larger beam diameter for shallow inclines to maintain spatial resolution, thus balancing both requirements.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables high-accuracy shape measurement of target objects by correcting measurement errors and weighting reliability, effectively mitigating the impact of speckle-induced noise on rough inclined surfaces.

Implementation Method 1

a distance measuring device configured to generate a distance detection waveform based on the reflected light

Methodology Applied
Scientific EffectOptical interference: Interference

Implementation Method 2

a laser light source configured to emit laser light

Methodology Applied
Scientific EffectLaser: Laser

Data Source

PatentUS11635295B2Shape measuring system and shape measuring method
Publication Date: 2023.04.25 HITACHI LTD
  • US11635295B2 patent drawing
  • US11635295B2 patent drawing
  • US11635295B2 patent drawing

AI summary

A shape of an object is measured with a high degree of accuracy. A shape measurement system comprises: a distance measuring head for irradiating an object with light and receiving light reflected from the object; a distance measuring device for generating a distance detection waveform on the basis of the reflected light; and a control device for analyzing the distance detection waveform and calculating a measured distance value to the object. The shape measurement system is characterized in that the control device calculates a feature amount of the distance detection waveform and performs at least one of a process of correcting an error in the measured distance value by substituting the feature amount into a correction formula and a process of performing a confidence weighting of an error in the measured distance value by substituting the feature amount into a confidence weighting formula.