Shape Measuring Apparatus Y-Axis Force Isolation
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Solution Overview
Problem
Conventional shape measuring apparatuses face challenges in achieving high-accuracy measurements due to vibrations induced by the Y-axis yoke, which lead to noise propagation and resonance, hindering precise positioning and measurement accuracy.
Innovation Solution
The apparatus incorporates a configuration with a first moving unit, a movement auxiliary unit, and a second moving unit, where the counteraction of force during movement is received in the movement auxiliary unit, reducing vibrations and enabling high-accuracy positioning by synchronizing the movement of the auxiliary unit with the first movable section, and using a position detecting device and position controlling section to drive-control the second axial drive unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the Y-axis yoke is used to generate thrust for moving the movable stage, then positioning capability is improved, but vibrations are generated that propagate noise and cause resonance
Solution Approach 1:
The thrust generation function is segmented between two independent systems: the first yoke (106X) generates thrust in the X-direction, and the second yoke (106Y) generates thrust in the Y-direction. Each yoke is independently supported, allowing the Y-axis thrust generation to be isolated from the surface plate (101) through the floor-mounted support plate (105Y), thereby preventing vibration propagation to the measurement system while maintaining positioning capability.
2Stability of the object's composition
If the support plate for the second Y-axis linear motor is mounted on the floor, then counteracting force is isolated from the surface plate, but vibrations from the floor are transmitted through the motor to the yoke
Solution Approach 1:
The harmful vibration transmission path from the floor is extracted and isolated from the measurement system. The support plate (105Y) mounting the second Y-axis linear motor (104Y) is taken out from the surface plate structure and mounted separately on the floor, extracting the counteracting force generation function away from the sensitive measurement platform while maintaining force isolation.
3Speed
If high-speed rough positioning is performed by the second Y-axis linear motor, then positioning speed is improved, but large thrust generation causes vibrations
Solution Approach 1:
The support plate (105Y) acts as an intermediary structure between the second Y-axis linear motor (104Y) and the floor (109). This intermediary mounts the motor on the floor rather than on the surface plate (101), allowing high-speed positioning operations to proceed while the intermediary structure absorbs and isolates the vibrations generated during high-thrust operation from the sensitive measurement system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses vibrations during measurement, allowing for high-accuracy shape measurement without generating excess noise, thereby improving the overall measurement precision.
Implementation Method 1
a first movable section backward and forward moving along a first axis direction with respect to a first fixed section... a second movable section laterally moving in a second axis direction with respect to a second fixed section
Implementation Method 2
The movable stage 102 is supported so as to be positioned movably in XY directions by use of an air bearing or the like
Data Source
AI summary
There are provided a first (Y-axial direction) moving unit, a movement auxiliary unit for moving in substantially parallel with the first moving unit, and a second (X-axial direction) moving unit for moving substantially perpendicular to the first moving unit. Force generated for moving the second moving unit is received by the movement auxiliary unit to perform driving of the XY directions. Thus, when a measuring probe provided on the second moving unit is scanned in the XY directions, vibrations of the first moving unit can be suppressed without the first moving unit receiving a counteraction of force that acts in a direction substantially perpendicular to the moving direction of the first moving unit.