Shaped Film Curing via Selective Polymerization
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Solution Overview
Problem
Existing substrate planarization techniques face challenges in achieving uniform film thickness and surface shape across large substrates, particularly due to substrate topography and material redistribution during the curing process, which affects the quality of further layers and devices fabricated on these substrates.
Innovation Solution
A method and system for shaping a film on a substrate using a polymerizable fluid, where droplets are dispensed and an initial superstrate contact region is brought into contact with a subset of droplets, followed by selective polymerization using actinic radiation, with spatio-temporal control of radiation distribution to achieve desired film characteristics, such as thickness and surface shape, compensating for overlay errors and substrate topography.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If conventional planarization techniques are used, then substrate flatness is improved, but film thickness uniformity deteriorates due to substrate topography and material redistribution
Solution Approach 1:
The patent applies preliminary action by selectively polymerizing regions of the fluid film before the superstrate is fully contacted with all droplets. This early polymerization locks in the desired film characteristics in the initial contact region before material redistribution can occur, thereby maintaining both substrate flatness and film thickness uniformity
Solution Approach 2:
The patent segments the curing process into distinct stages: first polymerizing the initial fluid film region, then subsequently contacting and polymerizing remaining droplets. This segmentation allows independent control of different film regions, preventing material redistribution from compromising film thickness uniformity while still achieving overall substrate flatness
2Area of stationary object
If the superstrate is brought into contact with all droplets before polymerization, then complete film coverage is achieved, but material redistribution occurs affecting film characteristics
Solution Approach 1:
The patent performs preliminary polymerization of the initial fluid film before completing the droplet contact process. This timing strategy captures the film in its desired state before material redistribution can occur during full superstrate contact, thereby achieving both complete coverage and uniform characteristics through controlled sequential processing
3Manufacturing precision
If selective polymerization is performed at different times, then desired film characteristics are achieved, but process complexity increases
Solution Approach 1:
The patent employs dynamic control by adjusting the relative position of the superstrate and substrate, and modifying pressure distribution on the superstrate during the process. These dynamic adjustments enable selective contact and polymerization of different droplet regions at different times, achieving precise film characteristic control while managing process complexity through coordinated motion and pressure control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise control of film characteristics, improving the uniformity and quality of the cured film across the substrate, enhancing the fabrication of devices by addressing substrate topography and material redistribution issues.
Implementation Method 1
The initial subset of droplets merge and form an initial fluid film over the initial substrate contact region. Prior to the superstrate coming into contact with the remaining plurality of droplets on the substrate, polymerizing a region of the initial fluid film on the initial substrate contact region.
Implementation Method 2
polymerizing a region of the initial fluid film by providing actinic radiation to the region of the initial fluid film
Data Source
AI summary
Systems and methods for shaping a film. The method of shaping a film may comprise dispensing a polymerizable fluid as a plurality of droplets onto a substrate. The method of shaping a film may further comprise bringing an initial superstrate contact region of a superstrate into contact with an initial subset of droplets of the plurality of droplets. The initial subset of droplets may merge and form an initial fluid film over the initial substrate contact region. The method of shaping a film may further comprise prior to the superstrate coming into contact with the remaining plurality of droplets on the substrate, polymerizing a region of the initial fluid film on the initial substrate contact region.