Shared Cooling Water Layout for Substrate Treatment Exposure Tools

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Solution Overview

Problem

The existing substrate treatment systems and exposure apparatuses consume a large amount of cooling water, leading to excessive usage.

Innovation Solution

A substrate treatment system is connected to an exposure apparatus with a first supply path that shares cooling water usage between the substrate treatment apparatus and the exposure apparatus, and includes a gas supply apparatus with a shared cooling water supply path to the exposure apparatus, optimizing temperature and humidity regulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If separate cooling water supply systems are used for substrate treatment apparatus and exposure apparatus, then each apparatus can be independently controlled, but total cooling water usage increases

Engineering Contradiction:

Improveindependent control capabilityVSAvoidcooling water usage

Core Design Contradiction:

ReliabilityVSQuantity of substance

Solution Approach 1:

The patent combines the cooling water supply systems of the substrate treatment apparatus and exposure apparatus into a shared system. The cooling water supply path is configured to supply cooling water to both apparatuses through common supply lines, enabling resource sharing while maintaining functional independence through separate control mechanisms for each apparatus.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The cooling water supply system is designed with universal functionality to serve multiple purposes - it can supply cooling water to the substrate treatment apparatus, the exposure apparatus, or both simultaneously. The system includes multiple supply paths and control valves that enable flexible allocation of cooling water resources based on operational requirements.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Quantity of substance

If cooling water is shared between substrate treatment apparatus and exposure apparatus, then total cooling water usage is reduced, but system complexity increases

Engineering Contradiction:

Improvecooling water usageVSAvoidsupply path configuration

Core Design Contradiction:

Quantity of substanceVSDevice complexity

Solution Approach 1:

The shared cooling water supply system is segmented into distinct supply paths with individual control mechanisms. Each apparatus has its own supply line with control valves, allowing independent regulation of cooling water flow to each device while sharing the common source. This segmentation simplifies control and maintenance compared to a fully integrated system.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces the total cooling water usage in the substrate treatment system and exposure apparatus by reusing cooling water within the system, ensuring appropriate temperature and pressure for efficient operation.

Implementation Method 1

a first supply path connecting the substrate treatment apparatus and the exposure apparatus and configured to supply cooling water used in the substrate treatment apparatus to the exposure apparatus

Methodology Applied

Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentUS20250218802A1Substrate treatment system and substrate treatment method

Publication Date: 2025.07.03 TOKYO ELECTRON LTD

AI summary

A substrate treatment system connected to an exposure apparatus, includes: a substrate treatment apparatus configured to perform a treatment on a substrate; and a first supply path connecting the substrate treatment apparatus and the exposure apparatus and configured to supply cooling water used in the substrate treatment apparatus to the exposure apparatus.