Shared-Gate CMOS Structure With Isolated Regions Against Latchup

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Solution Overview

Problem

Latchup phenomenon in CMOS circuits, triggered by internal or external noise, leads to malfunction or electrical failure, particularly in aerospace, outer space, server, and automobile applications, due to single event latchup caused by particle strikes or electromagnetic radiation.

Innovation Solution

The semiconductor device configuration includes specific active areas and gate arrangements with metal contacts that manage voltage levels to reduce the number of parasitic SCR circuits, thereby minimizing high current leakage by routing currents through lower resistance paths and neutralizing currents within the device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If transistors share gates in a CMOS circuit, then device complexity is reduced, but parasitic SCR circuits are formed causing latchup phenomena

Engineering Contradiction:
Improvegate structure complexityVSAvoidparasitic SCR circuits
Core Design Contradiction:
Device complexityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes the harmful parasitic SCR circuits from the shared gate structure by introducing isolation mechanisms. Specifically, it separates the parasitic SCR paths from the functional gate structure, allowing the beneficial gate sharing while eliminating the harmful latchup phenomena through targeted removal of parasitic elements.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces intermediary structures such as isolation regions and protective layers between the shared gates and active areas. These intermediaries act as mediators that prevent the formation of complete parasitic SCR circuits while maintaining the electrical functionality of the shared gate structure, thus resolving the contradiction between complexity reduction and parasitic elimination.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If parasitic SCR circuits are present, then current leakage increases causing malfunction, but removing them increases device complexity

Engineering Contradiction:
Improvecircuit malfunction preventionVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the device structure into distinct functional regions with different doping types and isolation characteristics. By dividing the CMOS circuit into separated n-type and p-type regions with appropriate isolation, it prevents the formation of complete parasitic SCR circuits while maintaining reasonable structural complexity through systematic segmentation rather than comprehensive redesign.

Inventive Principle:
Principle #1Segmentation

3Loss of energy

If metal contacts manage voltage levels to reduce parasitic SCR, then current leakage decreases, but manufacturing precision requirements increase

Engineering Contradiction:
Improvecurrent leakageVSAvoidmetal contact positioning
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

The patent performs preliminary actions during the fabrication process by pre-positioning metal contacts and pre-forming isolation structures before final device assembly. This preliminary positioning and formation of voltage-managing structures reduces current leakage pathways while allowing for standard manufacturing tolerances, thus reducing the precision requirements compared to post-fabrication adjustments.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11908859B2Semiconductor device including transistors sharing gates with structures having reduced parasitic circuit
Publication Date: 2024.02.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11908859B2 patent drawing
  • US11908859B2 patent drawing
  • US11908859B2 patent drawing

AI summary

A semiconductor device includes a first to sixth regions, a first gate, a first metal contact and a second metal contact. The second region is disposed opposite to the first region with respect to the first gate. The first metal contact couples the first region to the second region. The fourth region is disposed opposite to the third region with respect to the first gate. The second metal contact is coupling the third region to the fourth region. The fifth region is disposed between the first gate and the second region, and is disconnected from the first metal contact and the second metal contact. The sixth region is disposed between the first gate and the first region, and is disconnected from the first metal contact and the second metal contact.