Shared Optical Path Processing With Synchronized Measurement Alignment
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Solution Overview
Problem
Existing processing apparatuses face challenges in efficiently combining processing light and measurement light paths to accurately process and measure objects, particularly in adjusting irradiation positions and resolutions to achieve precise processing and measurement outcomes.
Innovation Solution
The apparatus incorporates a combining optical system to merge the processing light and measurement light paths, along with an irradiation position change optical system and a detection apparatus, allowing for synchronized adjustment of irradiation positions and resolutions to optimize processing and measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a combining optical system is used to merge processing light and measurement light paths, then measurement precision and processing accuracy are improved, but device complexity increases due to the need for additional optical components and synchronization mechanisms
Solution Approach 1:
The patent combines processing light and measurement light into a single optical path using a combining optical system. This allows both light types to share common optical components (lens, mirrors, irradiation position change optical system) while maintaining separate control, thereby improving measurement precision without proportionally increasing device complexity
Solution Approach 2:
The combining optical system enables a single optical path to serve dual functions: processing (via processing light) and measurement (via measurement light). The irradiation position change optical system similarly serves both processing and measurement functions, reducing the need for separate dedicated systems for each function
2Manufacturing precision
If an irradiation position change optical system is introduced to adjust irradiation positions of processing light and measurement light, then manufacturing precision is improved, but device complexity and ease of operation deteriorate due to additional control requirements
Solution Approach 1:
The irradiation position change optical system is designed to control both processing light and measurement light simultaneously. By using a single control mechanism (such as a galvanometer or voice coil actuator) that adjusts mirrors or lenses common to both light paths, the system achieves precise irradiation positioning for both functions without requiring separate control systems
Solution Approach 2:
The system incorporates feedback mechanisms where the irradiation position is monitored and adjusted in real-time. The control apparatus receives position information and adjusts the irradiation position change optical system to maintain accurate positioning, ensuring manufacturing precision while automating the control process
3Productivity
If processing light and measurement light are irradiated simultaneously through the same optical system, then productivity is improved, but measurement precision deteriorates due to light interference and thermal effects
Solution Approach 1:
The control apparatus alternates between irradiating with processing light and measurement light in periodic cycles. This time-division multiplexing approach allows both functions to share the same optical path while preventing light interference and thermal effects, as only one light type is present in the optical system at any given moment
Solution Approach 2:
Before processing irradiation, the system performs measurement irradiation to capture baseline data. The control apparatus coordinates the timing so that measurement occurs at optimal moments before processing begins, ensuring measurement precision is not compromised by subsequent processing effects
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise control over processing and measurement, enhancing the accuracy and efficiency of object processing by ensuring accurate alignment and resolution matching between processing and measurement light, thereby improving overall system performance.
Implementation Method 1
a combining optical system that combines an optical path of the processing light from the processing light source and an optical path of a measurement light including a pulsed light
Implementation Method 2
an irradiation optical system that irradiates the object with the processing light and the first measurement light that are through the combining optical system
Implementation Method 3
an irradiation position change optical system that is disposed between the combining optical system and the irradiation optical system and that changes an irradiation position of the processing light on the object and an irradiation position of the measurement light on the object
Implementation Method 4
a detection apparatus that detects, through the irradiation optical system and the combining optical system, a second measurement light that is generated from the object due to the first measurement light with which the object is irradiated through the irradiation optical system
Data Source
AI summary
A processing apparatus processes an object by irradiating the object with a processing light, and includes: a combining optical system that combines an optical path of the processing light from the processing light source and an optical path of a first measurement light from a measurement light source; an irradiation optical system that irradiates the object with processing light and the first measurement light through the combining optical system; a position change apparatus that changes a position of the irradiation optical system relative to the object; an imaging apparatus a position of which is changed together with the irradiation optical system and which captures an image of the object; and a detection apparatus that detects, through the irradiation optical system and the combining optical system, a second measurement light generated from the object due to the first measurement light with which the object is irradiated through the irradiation optical system.