Shared Vacuum Pumping System for Load Locks
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Solution Overview
Problem
Existing wafer handling systems for semiconductor processing have limitations such as low throughput, high cost, and complex design, particularly in the transfer of wafers to and from vacuum chambers, which affect the efficiency and cost-effectiveness of the manufacturing process.
Innovation Solution
A load lock system with a vacuum pumping system that includes a turbomolecular pump, roughing pumps, and a valve manifold block, allowing for high vacuum, roughing, and water pumping modes, with valves strategically positioned to optimize pressure control and sharing of pumping components between load locks, reducing complexity and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate vacuum pumping systems are used for each load lock, then each load lock can operate independently, but the system complexity and cost increase
Solution Approach 1:
The patent combines two separate vacuum pumping systems into a single shared pumping system. The first and second load locks share common vacuum pumping equipment, including roughing pumps and high vacuum pumps, connected through a vacuum distribution manifold. This merging reduces system complexity and cost while maintaining the ability to independently pump each load lock by using valve control to direct vacuum flow to the required chamber.
Solution Approach 2:
The shared vacuum pumping system is designed to serve multiple functions - it can pump the first load lock, the second load lock, or both simultaneously through valve control. The vacuum distribution manifold acts as a universal interface that routes vacuum flow to different chambers as needed, making the pumping system multi-functional and adaptable to different operational requirements.
2Loss of time
If multiple vacuum pumps are used to reduce pumping time, then the time to reach desired pressures decreases, but the system cost and complexity increase
Solution Approach 1:
The patent implements dynamic valve control that automatically directs vacuum pumping capacity to the load lock that requires pumping at any given moment. The valve manifold system dynamically switches connections between the shared vacuum pumps and different load locks based on operational needs, optimizing pumping time without requiring duplicate pump installations for each chamber.
Solution Approach 2:
The shared vacuum pumping system maintains continuous useful action by being able to pump either load lock at any time. While one load lock is being pumped, the other can be prepared or is maintaining vacuum, ensuring that the vacuum pumping capability is continuously utilized without idle time, thereby reducing overall pumping time despite having a single pumping system.
3Volume of stationary object
If a compact valve manifold block is used, then the volume of the pumping system is reduced, but the manufacturing precision requirements increase
Solution Approach 1:
The patent nests multiple valves and connection ports within a compact valve manifold block. The manifold block integrates several functional elements (valves, ports, passages) into a single compact unit, with internal passages connecting different ports. This nesting approach significantly reduces the overall volume of the pumping system while concentrating manufacturing requirements into a single precision-manufactured component rather than multiple separate parts.
Data Source
AI summary
A load lock system includes a first load lock defining a first chamber, a second load lock defining a second chamber, and a vacuum pumping system to vacuum pump the first and second chambers. The vacuum pumping system includes a high vacuum pump, a first valve to connect the first chamber to an inlet of the high vacuum pump in a first pumping mode, and a second valve to connect the second chamber to the inlet of the high vacuum pump in a second pumping mode. The high vacuum pump may be a turbomolecular pump. The vacuum pumping system may include a valve manifold block located between the first and second load locks. The first and second valves may be mounted in the valve manifold block. The vacuum pumping system may further include a shared water pump.