Shearing Force Test Device With Elastomer Offset Compensation
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Solution Overview
Problem
Existing shearing force test devices for fine pitch or ultra fine pitch semiconductor devices suffer from horizontal offset issues during contact positioning, leading to inaccurate and incomplete testing due to the cantilever beam structure's inherent horizontal displacement, which complicates control of different contact forces and results in dislocation between the push cutter and the welded gold balls.
Innovation Solution
A shearing force test device employing an elastomer with horizontal position offset compensation, featuring four elastic arms forming U-shaped structures and a micromotion mechanism, such as a sliding block and air bearing or magnetic system, to actively and naturally compensate for inverse horizontal displacement offsets, ensuring precise alignment and eliminating horizontal offset during contact sensing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a cantilever beam structure is used to realize contact sensing, then the test device can sense contact position, but horizontal offset occurs between fixed positions before and after contact
Solution Approach 1:
The patent employs an asymmetric cantilever beam structure where the beam is fixed at one end and free at the other, creating a deliberate asymmetric configuration that allows vertical movement while maintaining horizontal alignment through the asymmetric geometry itself
Solution Approach 2:
The patent transitions from a simple one-dimensional cantilever beam to a three-dimensional structure with vertical and horizontal components, allowing the beam to move vertically while the horizontal dimension maintains alignment through geometric constraints
2Ease of operation
If the free end of the cantilever beam rotates to contact the target plane, then contact sensing is achieved, but horizontal displacement offset occurs
Solution Approach 1:
The patent incorporates curved or rounded geometric features in the cantilever beam structure that allow smooth rotation and contact while maintaining horizontal alignment through the curvature's inherent geometric properties
3Ease of manufacture
If compressed air is used to push the sliding block for positioning, then the test head can be fixed on the substrate, but horizontal offset may occur during the pushing process
Solution Approach 1:
The patent uses compressed air to push the sliding block vertically, utilizing pneumatic pressure to achieve positioning while the horizontal alignment is maintained through the vertical nature of the pneumatic force and the guide structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively eliminates horizontal offset during contact positioning, allowing for precise and reliable shearing force testing of fine pitch or ultra fine pitch semiconductor devices by maintaining the test head and free end on the same vertical line, ensuring accurate and complete testing without positional dislocation.
Implementation Method 1
the elastomer has horizontal position offset compensation, comprising four elastic arms 100, 100', 200, 200'
Implementation Method 2
a sliding block 13 and an air bearing 14
Data Source
AI summary
A shearing force test device comprises a substrate mounted with an elastomer having a free end capable of moving toward or away from the substrate; the free end is connected with a test head; the elastomer is installed with two U-shaped elastic arms arranged at a distance and capable of mutually neutralizing horizontal position offsets; the free ends of the two U-shaped elastic arms are connected together; the test head is fixedly installed on the free end; the two U-shaped elastic arms are provided with the fixed end of the elastomer there between; the fixed ends of the two U-shaped elastic arms are connected together, and are fixedly connected with the substrate; and the other ends of the two U-shaped elastic arms away from the free ends are fixedly connected together via a connecting plate.


