Sheet Resistance Measurement Using Annular Electrodes

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Solution Overview

Problem

Current methods for measuring sheet resistance, such as the collinear four-probe array method, are complex, demanding in terms of instrumentation and skill, and limited by electrode size, leading to issues with contact resistance and electric heating.

Innovation Solution

A method involving mounting circular or annular electrodes on the sheet material, calculating resistance based on electrode diameter and distance, and using a theoretical model to determine sheet resistance, allowing for increased electrode diameter and reduced contact resistance and electric heating.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If small diameter probe tips are used to avoid electric heating effects, then electric heating is reduced, but contact resistance increases and measurement precision deteriorates

Engineering Contradiction:
Improveelectric heating effectVSAvoidmeasurement accuracy
Core Design Contradiction:
Object-affected harmful factorsVSMeasurement precision

Solution Approach 1:

The patent changes the key parameter from probe tip diameter to probe spacing. By increasing the spacing between probes while using larger diameter tips, the method reduces electric heating effects (which depend on current density and spacing) while maintaining or improving contact resistance through larger contact areas. This parameter transformation resolves the contradiction between avoiding electric heating and maintaining measurement precision.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If collinear four-probe array method with fixed probe spacing is used, then measurement standardization is achieved, but application range is limited and process complexity increases

Engineering Contradiction:
Improvemeasurement standardizationVSAvoidapplication range
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent segments the measurement process into two independent parts: (1) a standardized measurement procedure using fixed probe spacing and geometry, and (2) a flexible data processing stage using numerical simulation results. This allows the physical measurement to remain simple and standardized while the computational model adapts to different material types and measurement conditions, thereby expanding application range without increasing process complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces numerical simulation as an intermediary between the simple physical measurement and the complex material characterization. The simulation acts as a mediator that translates standardized probe measurements into accurate sheet resistance values for various material configurations, enabling broad adaptability while keeping the actual measurement process simple and standardized.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If repeated testing is performed to ensure measurement reliability, then measurement accuracy improves, but measurement time increases

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoidmeasurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary numerical simulations to establish the relationship between probe geometry, spacing, and measured resistance before actual measurements. This pre-computed knowledge allows single-shot measurements to be interpreted accurately without requiring repeated testing, thereby maintaining measurement reliability while significantly reducing measurement time.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the measurement process, reduces contact resistance and electric heating effects, and enables accurate sheet resistance determination without electrode diameter limitations, applicable to various conductive materials.

Implementation Method 1

the distribution of the potential and the electric current generated in the sheet material when direct current runs through the pair of circular or annular electrodes is calculated

Methodology Applied
Scientific EffectElectric current: Conduction (electrical)

Implementation Method 2

The potential field in the sample generated by the two terminal electrodes in the collinear four-probe array method

Methodology Applied
Scientific EffectPotential field: Electric Field

Implementation Method 3

measuring the resistance between the electrodes; and calculating the sheet resistance of the sheet material on the basis of a theoretical model from the resistance measured between the electrodes

Methodology Applied
Scientific EffectElectrical resistance: Electrical Resistance

Data Source

PatentUS10495593B2Testing method for sheet resistance of sheet material
Publication Date: 2019.12.03 SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
  • US10495593B2 patent drawing
  • US10495593B2 patent drawing
  • US10495593B2 patent drawing

AI summary

A testing method for the sheet resistance of a sheet material, comprising: mounting two circular or annular electrodes on the surface of the sheet material; measuring the resistance between the electrodes; and calculating the sheet resistance of the sheet material on the basis of a theoretical model from the resistance measured between the electrodes, the diameters of the electrodes, and the distance between the electrodes. The method places no restriction on the diameters of the electrodes; also, the annular electrodes work as effectively as circular electrodes, and annular electrodes may improve the contact between the edges of the electrodes, and the sheet material.