Semiconductor Storage Shelf Cleaning With Detachable Stall Access
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Solution Overview
Problem
Manual cleaning of semiconductor storage shelves is inefficient and poses safety hazards due to the need for multiple personnel and the risk of errors from pollution, which can affect product yield and sensor judgment.
Innovation Solution
An automated cleanup system comprising a conveying device and a detachable cleanup device that can be positioned and connected to each stall on the shelf, equipped with cleaning mechanisms and a dust suction device, allowing for periodic and thorough cleaning without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual cleaning is used, then cleaning can be performed, but cleaning efficiency is low and safety hazards increase
Solution Approach 1:
The cleaning system performs automatic cleaning of the storage shelf without requiring manual operation. The conveying device transports the cleaning device to various positions, and the cleaning device autonomously executes cleaning operations on reflector plates and wafer boxes, eliminating the need for personnel to manually clean high shelves and thereby improving both efficiency and safety.
2Productivity
If multiple cleaning personnel are used, then cleaning can be performed on high shelves, but safety hazards and operational complexity increase
Solution Approach 1:
The patent replaces the manual mechanical cleaning system with an automated cleaning system. The conveying device, equipped with driving mechanisms and cleaning components, automatically navigates to and cleans the reflector plates and wafer boxes, substituting human labor with a mechanical automation system that reduces operational complexity and safety risks.
3Measurement precision
If the reflector plate is stained, then sensor judgment accuracy decreases, but cleaning frequency increases
Solution Approach 1:
The cleaning system performs preliminary cleaning of the reflector plate to prevent staining before it affects sensor accuracy. By regularly maintaining the reflector plate in a clean state, the system ensures continuous accurate operation of the sensor for detecting wafer box positions, thereby preventing errors and reducing the need for frequent corrective cleaning interventions.
Data Source
AI summary
A cleanup system for the semiconductor storage shelf is provided. A semiconductor storage shelf is provided with a plurality of stalls. The cleanup system for the semiconductor storage shelf includes a conveying device and a cleanup device. The cleanup device is configured to clean up each stall of the semiconductor storage shelf. The cleanup device is detachably connected to the conveying device. The conveying device is configured to convey the cleanup device to each stall of the semiconductor storage shelf.