Shelf Nozzle Purge Scheduling for Clean Gas Storage
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Solution Overview
Problem
Existing storage systems face challenges in fully cleaning nozzles before transferring containers, leading to potential contamination of semiconductor wafers and increased clean gas consumption, as well as delays in transfer operations due to waiting for nozzle cleaning completion.
Innovation Solution
A storage system with a controller that assigns shelves in advance for incoming containers and initiates nozzle cleaning before the next container arrives, using flow amount controlling devices to supply clean gas intermittently, ensuring nozzles are fully cleaned without delaying transfer operations and minimizing clean gas consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If nozzle cleaning is performed by supplying clean gas continuously until transport apparatus arrives, then nozzles are fully cleaned, but transfer operations are delayed and clean gas consumption increases
Solution Approach 1:
The controller initiates nozzle cleaning operations in advance when a shelf is assigned for the next incoming container, before the transport apparatus actually arrives. This preliminary action ensures nozzles are fully cleaned by the time the container arrives, eliminating delays in transfer operations while maintaining reliable nozzle cleanliness.
Solution Approach 2:
The system dynamically adjusts the timing of nozzle cleaning based on real-time operational status. The controller monitors when shelves are assigned and when transport apparatus are scheduled to arrive, optimizing the start and duration of cleaning operations to complete刚好 before container arrival, thus avoiding both premature completion and excessive delays.
2Reliability
If nozzle cleaning is performed by supplying clean gas continuously until transport apparatus arrives, then nozzles are fully cleaned, but clean gas consumption increases
Solution Approach 1:
The controller starts nozzle cleaning when a shelf is assigned for the next incoming container, performing the cleaning action in advance. This allows the cleaning to be completed before the container arrives, reducing the total duration of clean gas supply while ensuring thorough nozzle cleanliness, thus lowering clean gas consumption.
Solution Approach 2:
The system implements periodic or intermittent cleaning cycles based on operational schedules rather than continuous cleaning. The controller activates cleaning only when needed based on shelf assignment and transport schedule, avoiding unnecessary continuous gas supply and reducing overall clean gas consumption while maintaining nozzle cleanliness.
3Loss of substance
If nozzle cleaning starts when transport apparatus arrives at unloading position, then clean gas consumption is reduced, but nozzles may not be fully cleaned before container transfer
Solution Approach 1:
The controller initiates nozzle cleaning in advance when a shelf is assigned for the next incoming container, not when the transport apparatus arrives. This preliminary timing ensures sufficient cleaning duration to fully clean nozzles before container transfer, maintaining reliable nozzle cleanliness while optimizing clean gas usage.
Solution Approach 2:
The controller monitors the cleaning process and transport schedule in real-time, adjusting the duration and intensity of clean gas supply based on feedback from shelf assignment status and transport apparatus position. This feedback mechanism ensures nozzles are fully cleaned before container arrival while avoiding excessive clean gas consumption.
4Device complexity
If shelf assignment is delayed until container arrival, then system operation is simplified, but nozzle cleaning cannot be performed in advance
Solution Approach 1:
The controller performs shelf assignment in advance, before the container arrives at the entrance/dispatch port. This preliminary assignment enables the system to start nozzle cleaning before container arrival, ensuring reliable nozzle cleanliness. The advance assignment adds minimal control complexity but enables proactive cleaning operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures nozzles are fully cleaned before container arrival, preventing contamination and reducing clean gas consumption by starting nozzle cleaning before the next container is placed, thereby maintaining cleanliness efficiently with reduced gas usage.
Implementation Method 1
at least one nozzle for supplying clean gas into containers
Implementation Method 2
plurality of flow amount controlling devices, respectively controlling supply amount of said clean gas to said at least one nozzle
Data Source
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AI summary
A storage system comprises: a plurality of shelves, respectively provided with a nozzle for supplying clean gas into containers; a plurality of flow amount controlling devices, respectively controlling supply amount of clean gas to a nozzle; a transport apparatus transferring the containers to and from the shelves; and a controller controlling the transport apparatus and the flow amount controlling devices. The controller makes an assignment of at least one shelf in preparation for storing an incoming container and before the occurrence of the incoming container, and controls a flow amount controlling device to supply clean gas to the nozzle in the at least one shelf, based upon the assignment.