Shelf Status Determination for Semiconductor Wafer Storage
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Solution Overview
Problem
Existing semiconductor fabrication processes face challenges in efficiently monitoring and maintaining shelving units used for storing semiconductor wafers, particularly in identifying potential shift events or damage during stocking operations.
Innovation Solution
An automated material handling system equipped with a shelf status monitoring apparatus, which includes an image sensor coupled to a stocking vehicle. This system captures images of shelving units during stocking operations to determine if they are associated with potential shift events, and flags damaged units for inspection and potential repair.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual inspection methods are used to monitor shelving units, then device complexity is reduced, but measurement precision and reliability of detecting shift events deteriorate
Solution Approach 1:
The patent replaces manual visual inspection with an automated image capture system using cameras or image sensors mounted on the material handling device. The system captures images of shelving units during stocking operations and uses image processing to automatically detect shift events, eliminating the need for human operators to visually inspect each shelf while achieving precise automated detection.
Solution Approach 2:
The system enables the shelving unit monitoring to be self-servicing by automatically capturing images, processing them through image analysis algorithms, and generating alerts for shift events without requiring external human intervention. The image processing system autonomously identifies positional changes of shelving units compared to reference positions stored in memory.
2Reliability
If continuous monitoring of all shelving units is implemented, then reliability of detecting shift events is improved, but productivity is reduced due to increased inspection time
Solution Approach 1:
The system performs image capture and analysis periodically at specific moments during stocking operations rather than continuously monitoring. Images are captured when the material handling device approaches or interacts with shelving units, allowing reliable detection at critical moments while maintaining high stocking operation speeds between capture events.
Solution Approach 2:
The system captures reference images of shelving unit positions before stocking operations begin or at predetermined intervals. These reference images are stored in memory and used for comparison during subsequent operations, enabling the system to detect shift events by comparing current images against pre-established baselines without requiring continuous active monitoring.
3Ease of operation
If automated image capture and analysis system is implemented, then ease of operation is improved, but device complexity increases
Solution Approach 1:
The image capture and processing system is integrated into the existing material handling device, allowing it to perform multiple functions: capturing images of shelving units, processing images to detect shift events, storing reference images, and generating alerts. This multi-functional integration simplifies operation by consolidating monitoring capabilities within the existing device structure rather than requiring separate dedicated monitoring equipment.
Data Source
AI summary
A method is provided. The method includes performing a first stocking operation associated with a first shelving unit using a stocking vehicle. The first stocking operation includes a put operation including transferring a first product unit from a load support component of the stocking vehicle to a first storage location over the first shelving unit, or a get operation including transferring the first product unit from the first storage location over the first shelving unit to the load support component of the stocking vehicle. The method includes capturing, using a first image sensor coupled to the stocking vehicle, a first image of a view associated with a first predefined position of the first shelving unit during the first stocking operation. The method includes determining, based upon the first image, whether the first shelving unit is associated with a potential shift event.