Shield Electrode and Via Structure for Imaging Device Crosstalk Reduction
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Solution Overview
Problem
Laminate-type imaging devices face challenges in achieving high resolution while maintaining sensitivity, as shield electrodes can interfere with signal charge collection, leading to potential declines in image quality and color mixing in color image sensors.
Innovation Solution
Incorporating a shield electrode between pixels with a first and second photoelectric conversion layer, and using a first and second pixel electrode, along with a shield via that extends between the electrodes, while also employing an insulating portion between the shield electrode and the photoelectric conversion layer to prevent signal charge interference and maintain sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a shield electrode is introduced to reduce crosstalk between adjacent pixels, then image quality and resolution are improved, but sensitivity may decline due to interference with signal charge collection
Solution Approach 1:
An insulating portion is introduced as an intermediary between the shield electrode and the photoelectric conversion layer. This insulating layer prevents direct contact and electrical interference while allowing the shield electrode to maintain its crosstalk reduction function, thereby preserving sensitivity without compromising image quality
Solution Approach 2:
The space between adjacent pixels is segmented into multiple functional zones: the shield electrode region for crosstalk suppression, and the insulating portion region for charge collection protection. This segmentation allows each component to perform its specific function independently without interfering with the other
2Ease of manufacture
If the pixel structure is simplified for ease of manufacture, then manufacturing precision may be compromised, affecting image quality
Solution Approach 1:
The insulating portion is merged with the inter-layer insulating film structure, combining multiple insulating functions into a single integrated layer. This reduces the total number of separate components and assembly steps while maintaining the required electrical isolation and structural precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-resolution image acquisition while suppressing sensitivity declines and color mixing, ensuring effective signal charge collection and improved image quality.
Implementation Method 1
a first photoelectric conversion layer that converts incident light to generate charge, and a first pixel electrode that collects the charge generated by the first photoelectric conversion layer
Data Source
AI summary
An imaging device includes: pixels that are disposed in a row direction and a column direction and that include a first pixel and a second pixel adjacent to the first pixel along the row direction; a shield electrode located between the first pixel and the second pixel; a first shield via that extends from the shield electrode. The first pixel includes: a first photoelectric conversion layer that converts incident light to generate charge; and a first pixel electrode that collects the charge generated thereby. The second pixel includes: a second photoelectric conversion layer that converts incident light to generate charge; and a second pixel electrode that collects the charge generated thereby. The shield electrode is electrically isolated from the first pixel electrode and the second pixel electrode, and the first shield via is located between the first pixel electrode and the second pixel electrode in a plan view.