Dark Space Shield Spacing Guide for Sputtering Target Alignment
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Solution Overview
Problem
Misalignment between the sputtering target and the dark space shield in PVD chambers leads to performance issues such as arcing, particle formation, and film non-uniformity, which existing technologies have not adequately addressed.
Innovation Solution
The use of a spacing guide with a horizontal body and laterally extending legs formed from insulating material, which is attached to the dark space shield to maintain consistent alignment between the sputtering target and the shield, reducing misalignment to within 1 mm along both horizontal and vertical axes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the sputtering target is mounted separately on a removable lid and lowered into the chamber body, then the target can be easily replaced and maintained, but misalignment between the target and dark space shield occurs causing arcing, particle formation and film non-uniformity
Solution Approach 1:
A spacing guide structure is introduced as an intermediary component between the sputtering target and the dark space shield. This spacing guide includes a horizontal body with first and second legs that extend laterally to contact the outer and inner surfaces of the shield respectively, maintaining a precise radial gap. The spacing guide is attached to the chamber body and provides mechanical guidance during target insertion, ensuring consistent alignment without compromising the removable lid design.
Solution Approach 2:
The spacing guide is pre-installed on the chamber body before the sputtering target is lowered into position. This preliminary positioning structure is already in place to guide the target during insertion, ensuring that alignment is established before the target begins its downward motion. The horizontal body and legs of the spacing guide are positioned to contact the shield and target in advance, preventing misalignment during the lowering process.
2Productivity
If the spacing between the sputtering target and dark space shield is reduced to improve deposition efficiency, then productivity increases, but misalignment causes arcing and performance issues
Solution Approach 1:
The spacing guide structure provides localized spacing control at critical positions where the target approaches the shield. The horizontal body and legs create a precisely controlled gap only in the regions where misalignment would cause arcing or performance issues, while allowing the overall spacing to be minimized for improved deposition efficiency. This localized quality control ensures reliability in critical areas without sacrificing overall productivity.
Data Source
AI summary
A spacing guide for use on a dark space shield of a sputtering chamber includes a horizontal body having a first end, a second end opposite the first end and a thickness, the horizontal body configured to rest on an end of the dark space shield; a first leg extending laterally from the first end of the horizontal body and configured to rest against an outer surface of the dark space shield; and a second leg extending laterally from the second end of the horizontal body and configured to rest against the inner surface of the shield.