Shield Window Structure for Clean Laser Crystallization Optics

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Solution Overview

Problem

Laser crystallizing apparatuses face contamination issues with the chamber window, leading to reduced laser beam transmittance and energy non-uniformity, resulting in frequent window replacements and energy shortages during the crystallization process.

Innovation Solution

A shield window is introduced below the chamber window, which is movable and rotatable, preventing contaminants from reaching the chamber window and allowing for multiple uses without replacement, thereby maintaining uniform beam transmission and reducing contamination-related issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the chamber window thickness is increased to tolerate pressure difference, then the structural strength is improved, but the beam transmittance is reduced due to increased contamination risk

Engineering Contradiction:

Improvepressure toleranceVSAvoidbeam transmittance

Core Design Contradiction:

StrengthVSLoss of energy

Solution Approach 1:

The patent divides the window system into two separate components: a chamber window for structural pressure tolerance and a shield window for contamination protection. This segmentation allows each component to be optimized independently - the chamber window can be thick for strength while the thin shield window maintains high transmittance.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The shield window acts as an intermediary protective layer between the contaminant source (substrate processing area) and the chamber window. It intercepts contaminants before they can reach and contaminate the chamber window, thereby preserving beam transmittance while the chamber window maintains its structural integrity.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If the chamber window is replaced frequently to maintain transmittance, then the beam energy uniformity is improved, but the productivity is reduced due to chamber atmosphere breakdown and particle generation

Engineering Contradiction:

Improvecrystallization uniformityVSAvoidprocessing efficiency

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The shield window is designed as a replaceable, consumable component that protects the expensive chamber window. By sacrificing the cheaper shield window instead of the main chamber window, the system maintains high transmittance without frequent replacement of the critical chamber window, thus avoiding productivity loss.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The shield window serves as a temporary copy or substitute for the chamber window's light-transmitting function during contamination exposure. It absorbs the contamination burden, allowing the chamber window to remain clean and functional for extended periods.

Inventive Principle:

Principle #26Copying

3Duration of action of stationary object

If a shield window is added to prevent contamination, then the chamber window lifespan is extended, but the device complexity increases

Engineering Contradiction:

Improvechamber window lifespanVSAvoidwindow system structure

Core Design Contradiction:

Duration of action of stationary objectVSDevice complexity

Solution Approach 1:

The shield window is designed to be movable relative to the laser beam path, allowing it to be dynamically positioned to intercept contaminants during processing and repositioned or removed for maintenance. This dynamic capability enables contamination protection without permanently complicating the optical path.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The shield window effectively reduces contamination and extends the lifespan of the chamber window, minimizing the frequency of replacements and maintaining consistent energy delivery to the substrate, ensuring uniform crystallization of thin films.

Implementation Method 1

a shield window movably disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window

Methodology Applied

Scientific EffectPhysical barrier: Physical Containment

Implementation Method 2

A laser beam transmitted through a chamber window of a laser crystallizing apparatus

Methodology Applied

Scientific EffectLaser heating: Laser

Implementation Method 3

The laser beam may be transmitted into the chamber window at an angle of from about 1° to about 10° with respect to a bottom surface of the chamber window

Methodology Applied

Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 4

The shield window may be movable in a vertical direction with respect to a length direction of the chamber window

Methodology Applied

Scientific EffectMechanical motion:

Implementation Method 5

the jig may be movable by driving a linear motor supporting the jig

Methodology Applied

Scientific EffectElectromagnetic force: Electromagnet

Data Source

PatentUS11666989B2Laser crystallizing apparatus

Publication Date: 2023.06.06 SAMSUNG DISPLAY CO LTD

AI summary

Provided is a laser crystallizing apparatus including a laser generator generating a laser beam and an optical system photo-converting the laser beam to make a converted laser beam. A beam transmitting unit includes a passage through which the converted laser beam is transmitted into the chamber. The beam transmitting unit includes a chamber window provided on the chamber to transmit the laser beam, and a shield window movably disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window.