Shielded Electron-Optical Connector for Stable Beam Alignment
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Solution Overview
Problem
In semiconductor manufacturing, high voltage connections to charged particle-optical devices can deform electrodes and affect beam alignment, leading to image aberrations and reduced yield due to the stiffness of high voltage cables and the presence of stray electromagnetic fields.
Innovation Solution
A charged particle-optical device with a shielded electrical connector that defines a field-free region, allowing a flexible coupling to connect the particle-optical element to a power source without external electric fields, thereby reducing the risk of deformation and improving beam alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If high voltage cables are used to connect the electrode to the power source, then high voltage can be supplied to the electrode, but the stiffness of the cable causes deformation of the electrode and affects beam alignment
Solution Approach 1:
The patent replaces stiff high voltage cables with a flexible coupling mechanism consisting of a flexible printed circuit board (FPC) and a bellows structure. The FPC allows electrical connection while accommodating positional adjustments, and the bellows provides flexible expansion/contraction capability, eliminating the deformation caused by rigid cable stiffness.
Solution Approach 2:
The patent introduces an intermediary flexible coupling system between the high voltage power source and the electrode. This intermediary consists of the FPC and bellows structure that mediates the connection, allowing electrical power transmission while preventing direct mechanical stress transmission that would cause electrode deformation.
2Reliability
If high voltage cables are used for connection, then electrical connection is established, but the connection affects beam alignment and causes image aberrations
Solution Approach 1:
The flexible printed circuit board and bellows structure enable reliable electrical connection while maintaining the ability to adjust beam alignment independently, as the flexible connection does not constrain the positional and angular adjustments needed for precise beam alignment.
Solution Approach 2:
The patent makes the connection system dynamic and adjustable through the flexible coupling mechanism, allowing the electrode and optical elements to be positioned and aligned precisely without being constrained by a rigid fixed connection, thereby improving beam alignment precision.
3Ease of operation
If stray electromagnetic fields are present in the connection region, then connection can be made, but the fields divert the charged particle beam
Solution Approach 1:
The patent introduces a shielded intermediary connection structure that acts as a barrier between the electromagnetic environment and the charged particle beam path. The shielding in the flexible coupling system blocks stray electromagnetic fields from diverting the beam while maintaining electrical connection functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise and stable high voltage connections, minimizing the risk of electrode deformation and improving the quality of images produced by reducing aberrations and enhancing the overall yield in semiconductor manufacturing.
Implementation Method 1
comprises a shield configured to define a field free region substantially free of electric fields
Implementation Method 2
The interactions between the material structure at the probing spot and the landing electrons from the beam of electrons cause electrons to be emitted from the surface, such as secondary electrons
Implementation Method 3
configured to be electrically connectable via a flexible coupling configured to electrically connect the plate of the charged particle-optical element to the electrical power source
Data Source
AI summary
A charged particle-optical device for projecting a plurality of charged particle beams along respective beam paths towards a sample location, the charged particle-optical device comprising: a charged particle-optical assembly configured to manipulate the charged particle beams, the charged particle-optical assembly comprising a first charged particle-optical element comprising a plate having one or more apertures around a beam path of the charged particle beams; and an electrical connector configured to electrically connect the plate of the first charged particle-optical element to an electrical power source, wherein the electrical connector: comprises a shield configured to define a field free region substantially free of electric fields; and is configured to be electrically connectable to a flexible coupling configured to electrically connect the plate of the first charged particle-optical element to the electrical power source, the flexible coupling located within the field free region.