Shielded Redistribution Structure for High-Frequency Microfeature Dies

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Solution Overview

Problem

Existing redistribution structures (RDS) in microelectronic devices suffer from line interference due to signal leakage, distortion, and electromagnetic interference, limiting high-performance operations.

Innovation Solution

A redistribution structure with a conductive shield surrounding conductive lines to reduce electromagnetic interference, allowing closer line spacing and independent impedance control, and enabling high-frequency signal transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional redistribution structures with unshielded lines and vias are used, then the device complexity is low and manufacturing is easier, but electromagnetic interference causes signal leakage and distortion limiting high-frequency operation

Engineering Contradiction:
Improvesignal transmission qualityVSAvoidredistribution structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

A conductive shield layer is introduced as an intermediary element between signal lines to block electromagnetic interference. The shield acts as a mediator that prevents direct electromagnetic coupling between adjacent lines, reducing crosstalk and signal distortion while maintaining reasonable structural complexity

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The redistribution structure employs composite material architecture combining conductive shield layers with insulating layers. This composite approach integrates electromagnetic shielding functionality with signal transmission pathways, achieving both EMI protection and signal integrity without excessive complexity increase

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If lines are spaced farther apart to reduce interference, then electromagnetic interference is reduced, but the area occupied by the redistribution structure increases

Engineering Contradiction:
Improveelectromagnetic interferenceVSAvoidredistribution structure area
Core Design Contradiction:
Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

The conductive shield serves as an intermediary that enables closer line spacing by blocking electromagnetic fields. Lines can be positioned nearer together because the shield prevents direct electromagnetic coupling, thus reducing the overall area while maintaining low interference levels

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

Thin conductive shield films are used to provide electromagnetic protection without adding significant volume. The shield layers are implemented as thin films that conform to the routing requirements, enabling compact area utilization while maintaining interference protection

Inventive Principle:
Principle #30Flexible shells and thin films

3Speed

If high-frequency signals are transmitted through conventional lines, then device performance is improved, but signal leakage and distortion occur due to electromagnetic interference

Engineering Contradiction:
Improvesignal transmission frequencyVSAvoidsignal transmission quality
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The conductive shield acts as a mediator that confines electromagnetic fields around signal lines, preventing energy leakage at high frequencies. This enables high-speed signal transmission by maintaining signal integrity through electromagnetic field containment

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The shield structure provides preliminary anti-action by preemptively blocking electromagnetic interference before it can affect signal transmission. The shield is positioned to prevent both outgoing signal leakage and incoming interference, ensuring clean high-frequency operation

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The conductive shield mitigates electromagnetic interference, enabling high-frequency signal transmission and reduced line spacing, enhancing device performance.

Implementation Method 1

A redistribution structure with a conductive shield surrounding conductive lines to reduce electromagnetic interference

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Data Source

PatentEP3544054B1Redistribution structures for microfeature workpieces
Publication Date: 2026.02.11 MICRON TECHNOLOGY INC
  • EP3544054B1 patent drawingFigure 1A~1B
  • EP3544054B1 patent drawingFigure 2A
  • EP3544054B1 patent drawingFigure 2B

AI summary

Microfeature dies with redistribution structures that reduce or eliminate line interference are disclosed. The microfeature dies can include a substrate (120) having a bond site (124) and integrated circuitry (123) electrically connected to the bond site. The microfeature dies can also include and a redistribution structure (122) coupled to the substrate. The redistribution structure can include an external contact (126) site configured to receive an electric coupler, a conductive line (128) that is electrically connected to the external contact site and the bond site, and a conductive shield (136, 142) that at least partially surrounds the conductive line.