Shielding Element Characterization for Sample-Side Defect Detection
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Solution Overview
Problem
Existing methods for characterizing shielding elements in particle beam devices are limited, as they often only assess the incidence side, failing to detect defects on the sample side that can directly interact with the sample and cause damage, leading to incomplete information and potential sample damage during operation.
Innovation Solution
A method and means for characterizing the shielding element by positioning a sensor or characterization means on the sample side, allowing direct access and assessment of the shielding element's surface, including capturing topology and detecting anomalies, to ensure accurate determination of defects and potential contact with the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If the shielding element is characterized only on the incidence side using the particle beam, then the characterization can be performed with existing methods, but defects on the sample side cannot be detected leading to incomplete information
Solution Approach 1:
Instead of characterizing the shielding element from the incidence side (traditional approach), the patent positions the means for characterizing on the sample side to directly observe defects that matter most. This inversion of the characterization direction enables detection of sample-side defects while using the same particle beam device, resolving the contradiction between information completeness and method complexity.
2Measurement precision
If the means for characterizing is positioned on the incidence side, then the setup is simpler, but the sample side cannot be directly accessed for accurate defect detection
Solution Approach 1:
The patent changes the spatial dimension of characterization by moving the means for characterizing from the incidence side to the sample side of the shielding element. This dimensional shift in positioning enables direct observation of the sample-facing surface, achieving precise defect detection while maintaining operational simplicity through the particle beam's ability to penetrate and image from different positions.
Data Source
AI summary
The present application relates to a method for characterizing a shielding element of a particle beam device for shielding an electric field between a sample position and a particle beam source. The method comprises positioning a means for characterizing the shielding element on a side of the shielding element which is facing the sample position.