Shielding Plate for Semiconductor Pressure Control Valve
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Solution Overview
Problem
In semiconductor process apparatuses, un dissociated liquid particles adhere to the valve plate of pressure control valves, causing unsmooth rotation and incomplete closure, which hinders pressure adjustment and increases maintenance costs.
Innovation Solution
A shielding unit with a shielding plate is positioned between the input end and the pressure control valve, switching between original and shielding positions to prevent liquid particle adhesion, allowing fluid conveyance while maintaining valve operation and facilitating easy pressure adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If liquid particles are allowed to flow through the pipe to the chamber, then the reaction process can proceed, but liquid particles adhere to the valve plate causing unsmooth rotation and incomplete closure
Solution Approach 1:
A shielding plate is introduced as an intermediary component between the pipe and the pressure control valve. The shielding plate selectively blocks liquid particles while allowing gas flow to pass through, preventing particle adhesion to the valve plate while maintaining the reaction process continuity
Solution Approach 2:
The flow path is segmented into different zones: an upstream region where liquid particles are present, a shielding region where the shielding plate blocks particles, and a downstream region where only gas reaches the valve. This segmentation allows the valve to operate reliably while the reaction continues
2Ease of operation
If the valve plate is exposed to liquid particles, then fluid conveyance is maintained, but the valve requires frequent maintenance and has shortened operational cycle
Solution Approach 1:
The shielding plate serves as a protective intermediary that intercepts liquid particles before they reach the valve plate. This allows the valve to maintain its fluid conveyance function while being protected from particle-induced wear and adhesion, thereby extending its operational cycle
Solution Approach 2:
The shielding plate performs preliminary filtration of liquid particles from the fluid stream before the particles can reach and damage the valve. This preliminary action prevents the accumulation of particles on the valve plate that would otherwise lead to frequent maintenance requirements
3Device complexity
If no shielding is provided, then the structure is simple, but liquid particles prevent complete valve closure and hinder pressure adjustment
Solution Approach 1:
The shielding plate is positioned upstream of the pressure control valve to prevent liquid particles from reaching it. This ensures complete valve closure capability while maintaining relatively simple system structure
Solution Approach 2:
The shielding plate is positioned in a different spatial location (upstream in the pipe) rather than modifying the valve structure itself. This dimensional separation allows the valve to function properly without direct particle exposure while adding minimal structural complexity
Data Source
AI summary
A process apparatus including a chamber, a pump, and a transportation system set between the chamber and the pump is provided. The transportation system has a pipe, a pressure control valve, and a shielding unit. The pipe has an input end connected to the chamber and an output end connected to the pump to pump fluids out of the chamber through the pipe. The pressure control valve between the input and output ends is disposed on the pipe and has a valve plate to adjust a fluid flow in the pipe. The shielding unit between the input end and the pressure control valve is disposed on the pipe and has a shielding plate to be switched between an original position and a shielding position. The shielding plate at the shielding position permits conveyance of fluids in the pipe and prevents certain liquid particles of the fluids floating in the pipe.