Independent Shielding Member Support for Film Formation Apparatus
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Solution Overview
Problem
Existing film formation apparatuses face challenges in precisely and easily setting the clearance between shielding members and workpieces, particularly due to the weight and rigidity requirements for large-scale processing, which complicates the attachment and detachment of shielding members and increases the effort needed for adjustments.
Innovation Solution
A film formation apparatus with a shielding member supported independently of the lid, featuring an outer-circumference and inner-circumference support system that allows for precise adjustment of clearance, and optional vibration absorbers and heat dissipating members to minimize deformation and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the lid is made thicker to suppress bending due to atmospheric pressure during vacuuming, then the rigidity is improved, but the weight increases
Solution Approach 1:
The shielding member is separated from the lid structure, with each component independently optimized. The lid focuses on vacuum sealing while the shielding member focuses on structural rigidity, eliminating the need for the lid to be overly thickened for both purposes simultaneously.
Solution Approach 2:
The shielding member is positioned at a different spatial level relative to the lid, creating an independent support structure that does not rely on the lid's thickness for structural integrity during vacuum operations.
2Strength
If the shielding member is made heavier to enhance rigidity and suppress deformation, then the strength is improved, but the ease of operation deteriorates
Solution Approach 1:
The shielding member is designed as a separate, detachable component from the lid, allowing it to be independently handled and installed. This segmentation enables the shielding member to have the necessary weight and rigidity without making the entire lid assembly difficult to operate.
Solution Approach 2:
A support structure acts as an intermediary between the shielding member and the lid, facilitating the attachment and detachment operations. This intermediary mechanism reduces the direct manual handling burden despite the shielding member's increased weight and size.
3Manufacturing precision
If the clearance between the shielding member and workpiece is reduced to prevent leakage, then the manufacturing precision is improved, but the reliability deteriorates due to contact during vacuuming
Solution Approach 1:
The shielding member's position is made dynamically adjustable rather than fixed. During vacuuming, the support structure allows the shielding member to maintain its position without contacting the workpiece, while during operation, the clearance is optimized for preventing material leakage. This dynamic positioning resolves the contradiction between tight clearance and contact prevention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and precise adjustment of clearance between the shielding member and workpiece, reducing the effort required for attachment and detachment, and preventing deformation and contamination, thus improving operational efficiency and reducing worker load.
Implementation Method 1
a film formation unit that deposit a film formation material by sputtering on the workpiece carried by the carrying unit to form a film
Data Source
AI summary
A film formation apparatus includes a chamber which has an interior capable of being vacuumed, and which includes a lid that is openable and closable on the upper part of the chamber, a rotation table which is provided in the chamber and which and carries a workpiece in the circular trajectory, a film formation unit that deposits film formation materials by sputtering on the workpiece carried by the rotation table to form films, a shielding member which is provided with an opening at the side which the workpiece passes through, and which forms a film formation room where the film formations by the film formation units are performed, and a support which supports the shielding member, and which is independent relative to the chamber and is independent from the lid.