Shielding TSVs for RFIC Interference Isolation

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Solution Overview

Problem

Existing radio-frequency integrated circuits (RFICs) face challenges in protecting sensitive circuits from neighboring radio- and electromagnetic interference (RMI) due to the lack of effective shielding mechanisms, which can lead to noise interference and signal degradation.

Innovation Solution

The implementation of through-silicon via (TSV) radio-frequency integrated circuits (RFICs) with shielding TSVs forming a 3D radio- and electromagnetic interference shield around sensitive sectors, such as GPS circuitry, using a combination of shielding TSVs and backside shields to create an enclosure that extends into the back-end metallization, thereby reducing noise interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If through-silicon via shielding structures are implemented, then electromagnetic interference shielding is improved, but device complexity increases

Engineering Contradiction:
Improveelectromagnetic interference shieldingVSAvoiddevice complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The shielding structure is segmented into multiple through-silicon via regions that divide the die into distinct shielded sectors. Each sector can be independently shielded, allowing selective protection of sensitive circuits while maintaining functionality in other areas. This segmentation approach provides effective electromagnetic shielding without requiring complete enclosure of the entire device.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar shielding approaches to three-dimensional through-silicon via structures that extend vertically through the entire die thickness. This dimensional change creates enclosed sectors by utilizing the vertical dimension, forming shielded regions that block electromagnetic interference paths without requiring additional lateral space.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If shielded sectors are created using through-silicon vias, then signal integrity is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvesignal integrityVSAvoidmanufacturing precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The shielding function is merged with the existing through-silicon via fabrication process used for electrical interconnects. By combining the shielding via formation with standard TSV processing steps, the patent achieves electromagnetic shielding without requiring separate manufacturing operations, thereby reducing the impact on manufacturing precision requirements.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The through-silicon via structures serve dual functions: providing both electrical interconnect pathways and electromagnetic shielding. This multi-functionality allows the same structural elements to address both signal transmission and interference protection, reducing the need for additional precision-critical components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively shields sensitive RF circuits from RMI, enhancing signal integrity and reducing noise interference, allowing for improved performance in multi-functional RFICs by isolating different RF capabilities within the same die.

Implementation Method 1

through-silicon via (TSV) radio-frequency integrated circuits (RFICs) with shielding TSVs forming a 3D radio- and electromagnetic interference shield around sensitive sectors

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Data Source

PatentEP2705532B1Radio- and electromagnetic interference through-silicon vias for stacked-die packages, and methods of making same
Publication Date: 2019.11.13 INTEL CORP
  • EP2705532B1 patent drawingFigure 1a~2
  • EP2705532B1 patent drawingFigure 1b
  • EP2705532B1 patent drawingFigure 1c

AI summary

An apparatus includes a radio-frequency die with shielding through-silicon vias and a die backside lattice lid that shield a sector in the RF die from radio - and electromagnetic interference.