Shock Absorbing Substrate Support Mechanism
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Solution Overview
Problem
Conventional substrate support apparatuses often damage softer substrates during transport due to excessive pressure from fixed claws, and the existing shock absorbing mechanisms are not flexible enough to accommodate varying substrate materials and sizes.
Innovation Solution
A substrate support apparatus with a first and second connecting plate connected by linear support members and an elastic shock absorbing member, which reduces external forces on the substrate during attachment, preventing damage by distributing pressure across multiple fixed claws.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional substrate support apparatus with fixed claws is used to transport and attach substrates, then the substrate can be securely held and transported, but the fixed claws excessively press the substrate during attachment, causing damage to softer substrates
Solution Approach 1:
The patent introduces a shock-absorbing mechanism with elastic elements (springs or rubber buffers) between the substrate support apparatus and the fixed claws. This cushioning mechanism is pre-installed to absorb impact forces during substrate attachment, preventing excessive pressure from reaching the substrate and causing damage while maintaining secure attachment.
2Object-affected harmful factors
If a rigid shock absorbing mechanism is used to protect softer substrates, then substrate damage is prevented, but the mechanism lacks flexibility to accommodate varying substrate materials and sizes
Solution Approach 1:
The patent employs elastic elements with adjustable parameters (spring constant, buffer hardness) that can be selected or adjusted based on substrate properties. The shock-absorbing mechanism allows parameter changes to match different substrate materials and sizes, providing both protection and adaptability.
Solution Approach 2:
The shock-absorbing mechanism uses elastic elements that dynamically adjust their stiffness and absorption characteristics based on the applied load and substrate properties. This dynamic response allows the mechanism to adapt to varying substrate materials and sizes while maintaining effective protection.
3Weight of moving object
If the substrate mass decreases with reducing substrate size, then smaller substrates are easier to handle, but a shock absorbing mechanism with higher elasticity is needed to match the reduced mass and prevent damage
Solution Approach 1:
The patent allows selection or adjustment of elastic element parameters (spring constant, buffer dimensions) to match the reduced mass of smaller substrates. This parameter adjustment ensures the shock absorption characteristics are appropriately scaled to prevent damage while maintaining handling ease.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively prevents substrate damage by reducing external forces and ensuring secure attachment, even for softer substrates, while allowing for flexible adaptation to different substrate materials and sizes.
Implementation Method 1
an elastic shock absorbing member inserted between the first connecting plate and the second connecting plate
Data Source
AI summary
A substrate support apparatus has a substrate holding portion to be inserted into a center hole formed in a substrate to support the substrate in a vertical orientation, and includes a first connecting plate connected to the substrate holding portion and a second connecting plate which faces the first connecting plate and is connectable to a transport robot that transports the substrate to a substrate holder. In addition, a shock absorbing member is arranged between the first connecting plate and the second connecting plate so as to allow a movement of the first connecting plate relative to the second connecting plate in horizontal and vertical directions. Support members are configured to connect the first connecting plate to the second connecting plate while allowing the movement of the first connecting plate relative to the second connecting plate.