Shock-Robust Multi-Axis MEMS Gyroscope with Rotary Joint Drive
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Solution Overview
Problem
Current MEMS gyroscopes face challenges in integrating multiple single-axis sensors into a single device while maintaining shock robustness and avoiding complex control systems, which is essential for applications requiring multi-axial sensing and immunity to environmental disturbances.
Innovation Solution
The integration of three single-axis shock-robust gyroscopes into a single silicon substrate using a mechanical driving system with rotary joints that distribute driving forces to maintain performance and simplify the control system, allowing for a single-drive tri-axial or multi-axis configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If three single-axis gyroscopes are integrated into a single silicon substrate, then multi-axial sensing capability is achieved and device size is reduced, but device complexity increases due to redundant differential structures and complex control system requirements
Solution Approach 1:
The patent combines three single-axis gyroscopes into a single integrated multi-axial gyroscope device on one silicon substrate. The driving system merges multiple driving masses and rotary joints into a unified mechanical structure that can drive all three gyroscopes simultaneously, reducing the need for separate control systems while maintaining shock robustness through shared mechanical components.
Solution Approach 2:
The mechanical driving system with rotary joints serves multiple functions: it distributes driving forces to multiple gyroscopes, enables multi-axial sensing capability, and maintains shock robustness through its differential structure. The single drive system performs the work of multiple independent control systems, simplifying the overall device while achieving versatility.
2Reliability
If high-end shock-robust gyroscopes are designed with redundant differential structures, then immunity to environmental disturbances is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The patent segments the gyroscope device into three independent single-axis gyroscope units, each maintaining its own shock-robust differential structure. This segmentation allows each unit to be optimized for shock robustness independently while being integrated into a single device, making manufacturing more manageable compared to designing a completely new multi-axial shock-robust structure.
Solution Approach 2:
The patent nests three single-axis gyroscopes within a single integrated device structure. Each gyroscope unit is contained within the larger multi-axial device, allowing the use of proven shock-robust single-axis designs to be embedded within the integrated structure, thereby maintaining reliability while managing manufacturing complexity through modular integration.
3Reliability
If independent single-axis high-end gyroscopes are integrated at board level, then shock robustness is maintained, but device size is increased and integration efficiency is reduced
Solution Approach 1:
The patent merges three independent single-axis gyroscopes into a single integrated device on one silicon substrate, reducing the overall device volume compared to board-level integration. The shared mechanical driving system and common substrate further reduce the space required while maintaining the shock robustness of each individual gyroscope unit.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables reliable, shock-robust multi-axis sensing by maintaining the core design's shock robustness and simplifying the control system, ensuring directional stability and operational reliability even under shock conditions.
Implementation Method 1
a mechanical component of a driving system is based on a set of rotary joints that distributes driving forces in a manner such as to adjust the direction of the driving motion in accordance with the needs of a plurality single-axis gyroscopes
Data Source
AI summary
Various embodiments of the invention integrate multiple shock-robust single-axis MEMS gyroscopes into a single silicon substrate while avoiding the complexities typically associated with designing a multi-drive control system for shock immune gyroscopes. In certain embodiments of the invention, a shock immune tri-axial MEMS gyroscope is based on a driving scheme that employs rotary joints to distribute driving forces generated by two sets of driving masses to individual sensors, thereby, simplifying the control of the gyroscope.