Imprint Shot Region Grouping for Continuous Dispenser Flow
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Solution Overview
Problem
Conventional imprint apparatuses lack the functionality to edit groups of shot regions where imprint material is continuously supplied, limiting the degree of freedom in operation.
Innovation Solution
An imprint apparatus with a user interface that allows users to assign each shot region to groups, enabling continuous supply of imprint material from a dispenser, and automatic assignment of shot regions for improved operational flexibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a function to allow users to edit groups of shot regions is not provided, then the device complexity is low, but the ease of operation is limited
Solution Approach 1:
The patent divides shot regions into editable groups that can be independently configured and controlled. Users can segment the substrate into multiple shot regions and organize them into groups, allowing flexible control over which regions receive continuous material supply versus discrete supply. This segmentation enables the user interface to manage complexity by organizing shot regions into manageable units.
Solution Approach 2:
The patent implements a dynamic user interface that allows users to modify group assignments and shot region configurations in real-time. The system transitions from a fixed, predetermined shot region arrangement to a dynamic, user-editable structure where groups can be created, modified, and deleted during operation, enhancing operational flexibility without requiring permanent system reconfiguration.
2Productivity
If shot regions are processed individually without grouping, then the control system is simple, but the productivity is reduced
Solution Approach 1:
The patent merges multiple shot regions into groups that can be processed together with continuous material supply. By combining adjacent shot regions into unified groups, the system enables continuous dispenser operation across multiple regions without stopping to reload material, thereby improving productivity through batch processing while maintaining manageable control through the user interface.
Solution Approach 2:
The patent allows users to pre-configure shot region groups and define continuous supply paths before actual processing begins. This preliminary organization of shot regions into groups enables the system to execute continuous material supply operations without real-time decision-making complexity, as the group structures and supply routes are predetermined and can be reviewed and adjusted before production.
3Adaptability or versatility
If the imprint material supply method is fixed, then the device complexity is low, but the adaptability is limited
Solution Approach 1:
The patent creates a universal control system that can handle both continuous and discrete material supply modes through the same user interface and group management structure. The system is designed to accommodate different supply methods (continuous vs. discrete) and different shot region configurations (single region, multiple regions, grouped regions) using a unified approach, allowing the apparatus to adapt to various processing requirements without requiring separate control mechanisms for each mode.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the degree of freedom in operation by allowing flexible grouping and continuous material supply, improving the efficiency and precision of pattern formation on substrates.
Implementation Method 1
the imprint material is cured
Data Source
AI summary
An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.


