Shower Head Blocking Airflow for Precise Process Gas Control
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in precisely controlling the amount of process gas supplied due to residual gas in the line and delayed supply, leading to non-uniform distribution during substrate processing.
Innovation Solution
A shower head assembly with a blocking airflow forming unit that intersects the process gas discharge direction, using inert gas to form a blocking airflow, allowing precise control of gas supply and distribution through individually partitioned spaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If process gas supply is controlled through the process gas supply unit, then the supply can be stopped or initiated, but the process gas remaining in the line and inside the shower head is additionally supplied, and the supply is delayed during transport time, making it difficult to precisely control the amount of process gas
Solution Approach 1:
The invention divides the gas control system into two independent parts: the process gas supply unit and the blocking airflow forming unit. The blocking airflow unit is segmented into multiple blocking units corresponding to different regions of the shower head, allowing independent control of gas blocking in each region. This segmentation enables precise control of process gas amount by blocking gas flow at the shower head level rather than relying solely on supply unit control, thereby eliminating the delay caused by gas transport time through the line.
Solution Approach 2:
The blocking airflow acts as an intermediary mechanism between the process gas supply unit and the substrate processing space. By introducing this intermediate blocking layer, the system can quickly adjust the actual gas discharge amount at the shower head without being constrained by the transport delay in the supply line. The blocking airflow unit serves as a mediator that provides immediate control over gas flow to the substrate, resolving the timing discrepancy between supply control and actual gas arrival.
2Manufacturing precision
If process gas is supplied uniformly through the shower head, then the substrate processing can be performed, but the amount of process gas discharged from the shower head for each area needs to be controlled for uniform substrate processing
Solution Approach 1:
The blocking airflow forming unit is divided into multiple blocking units, with each blocking unit corresponding to a specific region of the shower head. This segmentation allows independent control of gas blocking in different areas, enabling precise adjustment of gas distribution uniformity across the substrate surface. Each blocking unit can be independently adjusted to compensate for regional variations in gas flow, achieving uniform substrate processing without requiring complex overall system redesign.
3Measurement precision
If blocking airflow is formed to block process gas discharge, then precise control of gas supply is achieved, but the shower head structure becomes more complex with gas supply ports, gas discharge ports, and partition walls
Solution Approach 1:
The blocking units serve multiple functions simultaneously: they block process gas discharge when needed, supply blocking airflow to create the blocking effect, and can be independently controlled for regional gas distribution adjustment. This multi-functionality reduces the need for separate components for each function, thereby mitigating the increase in device complexity while achieving precise gas control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and uniform control of process gas supply, enhancing the precision and efficiency of substrate processing.
Implementation Method 1
a blocking airflow forming unit configured to block discharge of the process gas by forming a blocking airflow flowing in a direction intersecting a discharge direction of the process gas inside the shower head
Data Source
AI summary
Proposed are a shower head assembly and a substrate processing apparatus including the same. The shower head assembly includes a shower head for discharging a process gas into a substrate processing space of a process chamber, and a blocking airflow forming unit configured to block discharge of the process gas by forming a blocking airflow within the shower head, which passes through the inside of the shower head in a direction perpendicular to a discharge direction of the process gas. According to the shower head assembly, the amount of process gas supplied to the substrate processing space may be precisely controlled.