Shower Head Cooling Channel Separation for Uniform Reactor Temperature

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Solution Overview

Problem

In substrate processing apparatuses, temperature control issues lead to temperature imbalances, affecting process repeatability and causing safety hazards, equipment malfunctions, and film quality deterioration due to uncontrolled high temperatures, particularly in gas supply devices like shower heads.

Innovation Solution

A cooling device with a separator structure that separates the coolant flow into distinct areas, allowing coolant to flow in different directions without mixing, ensuring uniform cooling and maintaining flow direction, thereby preventing temperature imbalances and enhancing cooling efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the reactor is heated to high temperature for chemical reactions, then the process temperature is maintained, but the gas supply device temperature becomes uncontrolled and exceeds safe limits

Engineering Contradiction:

Improvereactor temperatureVSAvoidgas supply device overheating

Core Design Contradiction:

TemperatureVSObject-affected harmful factors

Solution Approach 1:

The cooling device is divided into multiple partitions (first partition, second partition, third partition) that create separate cooling channels. This segmentation allows independent temperature control of different regions of the gas supply device, enabling the reactor to be heated while specific areas of the gas supply device are actively cooled to prevent overheating.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the gas supply device receive different cooling intensities through the partitioned cooling channels. The separator creates asymmetric flow paths that direct coolant to specific hot spots, allowing local temperature control rather than uniform cooling, thus maintaining reactor temperature while preventing localized overheating.

Inventive Principle:

Principle #3Local quality

2Temperature

If coolant flows are mixed in the cooling channels, then cooling coverage is improved, but cooling efficiency decreases due to flow interference

Engineering Contradiction:

Improvecooling uniformityVSAvoidcooling efficiency

Core Design Contradiction:

TemperatureVSLoss of energy

Solution Approach 1:

The separator divides the cooling channels into distinct first and second areas with separate flow paths. This segmentation prevents coolant flows from mixing and interfering with each other, allowing each flow to maintain optimal velocity and cooling efficiency while still achieving comprehensive temperature control through the partitioned structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The separator acts as an intermediary structure that guides coolant flows through separate channels (first channel and second channel) without direct interaction. This mediator prevents flow interference and energy loss while ensuring that both cooling zones operate at peak efficiency, achieving uniform cooling without the penalties of mixed flows.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Temperature

If the gas supply device temperature is not controlled, then the reactor can operate at high temperature, but safety hazards and equipment malfunction occur

Engineering Contradiction:

Improvereactor operating temperatureVSAvoidequipment safety

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The cooling device is pre-configured with partitions and separators that create controlled cooling pathways before the gas supply device can overheat. This preliminary structural arrangement ensures that coolant can be directed to critical areas proactively, preventing temperature excursions before they reach dangerous levels rather than reacting to overheating after it occurs.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The partitioned cooling structure with separate flow paths enables differential cooling control that responds to local temperature conditions. By maintaining separate coolant streams that can be independently regulated, the system provides feedback control capability where cooling intensity can be adjusted based on real-time temperature requirements of different gas supply device regions.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The cooling device effectively maintains temperature uniformity, reduces the risk of safety hazards, and improves the reliability and quality of the deposition process by ensuring consistent coolant circulation and efficient cooling of gas supply devices.

Implementation Method 1

A cooling device with a separator structure that separates the coolant flow into distinct areas, allowing coolant to flow in different directions without mixing, ensuring uniform cooling

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

Methodology Applied

Scientific EffectConvection: Convection

Data Source

PatentUS11993843B2Substrate processing apparatus

Publication Date: 2024.05.28 ASM IP HLDG BV

AI summary

Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.