Shower Head Hole Layout for Uniform Gas Flow Under Thermal Stress

Solution Overview

Problem

Current shower heads used in substrate processing apparatuses face challenges in uniformly supplying process gases and maintaining a long lifespan, particularly due to the limitations in gas distribution patterns and the structural integrity of supporting pillars under thermal stress.

Innovation Solution

The shower head design incorporates a lower plate with a combination of vertical and inclined gas holes, along with a thick supporting pillar, where the inclined holes are strategically positioned to ensure uniform gas distribution and are designed to match the conductance of vertical holes, and the supporting pillar is thickened to withstand thermal stress, allowing for efficient gas supply and extended lifespan.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If a thick supporting pillar is used to withstand thermal stress, then the lifespan and structural integrity are improved, but the gas distribution uniformity deteriorates due to shadowing effects

Engineering Contradiction:

ImprovelifespanVSAvoidgas distribution uniformity

Core Design Contradiction:

Duration of action of stationary objectVSManufacturing precision

Solution Approach 1:

The gas distribution plate is divided into multiple regions (central region with vertical holes, peripheral regions with inclined holes) to address the shadowing effect caused by the thick supporting pillar. This segmentation allows gas to reach different areas through optimized pathways, maintaining uniform distribution while preserving the pillar's thermal stress resistance.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different hole configurations are applied to different regions of the gas distribution plate. The central region uses vertical holes for direct gas supply, while peripheral regions use inclined holes to bypass the supporting pillar's shadowing effect. This local differentiation ensures optimal gas distribution uniformity without compromising the pillar's structural integrity and lifespan.

Inventive Principle:

Principle #3Local quality

2Device complexity

If only vertical holes are used in the gas distribution plate, then the structure is simple, but the gas supply uniformity deteriorates due to shadowing by the supporting pillar

Engineering Contradiction:

Improvehole configurationVSAvoidgas supply uniformity

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The gas distribution plate is divided into multiple regions (central region with vertical holes, peripheral regions with inclined holes) to address the shadowing effect caused by the thick supporting pillar. This segmentation allows gas to reach different areas through optimized pathways, maintaining uniform distribution while preserving the pillar's thermal stress resistance.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different hole configurations are applied to different regions of the gas distribution plate. The central region uses vertical holes for direct gas supply, while peripheral regions use inclined holes to bypass the supporting pillar's shadowing effect. This local differentiation ensures optimal gas distribution uniformity without compromising the pillar's structural integrity and lifespan.

Inventive Principle:

Principle #3Local quality

3Reliability

If the supporting pillar is made thick to resist thermal stress, then the reliability is improved, but the gas flow distribution deteriorates in the shadowed region

Engineering Contradiction:

Improvethermal stress resistanceVSAvoidgas flow distribution

Core Design Contradiction:

ReliabilityVSQuantity of substance

Solution Approach 1:

The gas distribution plate is divided into multiple regions (central region with vertical holes, peripheral regions with inclined holes) to address the shadowing effect caused by the thick supporting pillar. This segmentation allows gas to reach different areas through optimized pathways, maintaining uniform distribution while preserving the pillar's thermal stress resistance.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different hole configurations are applied to different regions of the gas distribution plate. The central region uses vertical holes for direct gas supply, while peripheral regions use inclined holes to bypass the supporting pillar's shadowing effect. This local differentiation ensures optimal gas distribution uniformity without compromising the pillar's structural integrity and lifespan.

Inventive Principle:

Principle #3Local quality

Data Source

PatentUS20240200190A1Shower head and substrate processing apparatus including the shower head

Publication Date: 2024.06.20 SAMSUNG ELECTRONICS CO LTD

AI summary

A shower head may include a lower shower head part including a lower plate. The lower plate includes a lower plate, the lower plate includes a plurality of gas holes, the plurality of gas holes includes: a vertical hole vertically penetrating the lower plate in a first direction; and an inclined hole penetrating the lower plate in a second direction, which is inclined at an acute angle with respect to the first direction of the vertical hole, the vertical hole has a first diameter and the inclined hole has a second diameter which is different than the first diameter.