Shower Head Temperature Control for Uniform Semiconductor Films
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The quality of films formed on multiple substrates varies due to changes in processing environment caused by temperature fluctuations in the process chamber, especially after substrate replacement in substrate processing apparatuses.
Innovation Solution
A method involving temperature measurement and control of the shower head heater to maintain uniformity by comparing the shower head temperature with a preset value and adjusting the heater operation to compensate for temperature differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrate replacement operation is performed in the process chamber, then productivity is improved by enabling continuous processing of multiple substrates, but manufacturing precision deteriorates due to temperature changes causing film quality variation
Solution Approach 1:
The system performs preliminary temperature measurement of the shower head before substrate processing begins, and pre-adjusts the shower head heater to compensate for anticipated temperature changes during substrate replacement operations, ensuring temperature stability is maintained before processing starts
Solution Approach 2:
The system continuously monitors the shower head temperature using a temperature sensor and provides feedback to the control unit, which automatically adjusts the shower head heater power to maintain the shower head temperature within a predetermined range despite substrate replacement operations
2Manufacturing precision
If shower head temperature is continuously monitored and adjusted, then manufacturing precision is improved by maintaining uniform film quality, but device complexity increases due to additional temperature measurement and control mechanisms
Solution Approach 1:
The shower head heater system performs self-adjustment based on temperature feedback, automatically compensating for temperature changes without requiring external intervention or complex manual control mechanisms, simplifying the overall system operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures consistent film quality across multiple substrates by maintaining uniform temperature conditions despite environmental changes in the processing environment.
Implementation Method 1
heating the dispersion plate by a shower head heater
Implementation Method 2
measuring a temperature of the shower head
Data Source
AI summary
Described herein is a technique capable of uniformizing a quality of a film even when a processing environment changes. According to one aspect thereof, there is provided a method of manufacturing a semiconductor device, including: (a) loading a substrate into a process chamber; (b) supplying a gas to the substrate in the process chamber through a dispersion plate of a shower head while heating the dispersion plate by a shower head heater and exhausting the gas; (c) unloading the substrate; (d) measuring a temperature of the shower head before loading a subsequent substrate; and (e) comparing the temperature of the shower head after (d) with a pre-set temperature, and operating the shower head heater to control the temperature of the shower head to become close to the pre-set temperature when a difference between the temperature of the shower head and the pre-set temperature is greater than a predetermined value.