Shower Plate Channel Layout for Faster Multi-Gas Distribution
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Solution Overview
Problem
Existing substrate processing systems face challenges in efficiently distributing multiple gases to different regions within a plasma processing chamber, leading to inefficiencies and potential interference between gas flows.
Innovation Solution
A shower plate with an integrally formed base containing gas flow channels that extend in different directions, allowing for independent arrangement and reduced bends, thereby minimizing gas volume and improving responsiveness and reducing residual gas influence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas flow channels are arranged in conventional configurations, then gas distribution is achieved, but gas flow interference and residual gas influence increase
Solution Approach 1:
The patent applies dimensional change by arranging second portions of different gas flow channels at mutually different positions in the thickness direction (z-direction), rather than only in the planar direction. This three-dimensional arrangement separates gas flows vertically, reducing interference between different gas streams and minimizing residual gas influence on substrate processing.
2Adaptability or versatility
If gas flow channels have multiple bends to reach different regions, then gas can be distributed to various areas, but gas volume increases and responsiveness decreases
Solution Approach 1:
The patent utilizes the thickness direction as an additional dimension for channel arrangement, allowing gas flow channels to reach different regions with fewer bends by extending in the z-direction. This reduces the total channel length and gas volume while maintaining comprehensive coverage of the substrate processing area.
Solution Approach 2:
The gas flow channels are integrated within the integrally formed base structure, with channels nested throughout the base thickness. This nested arrangement allows efficient space utilization and direct gas delivery paths to multiple regions without requiring external routing and multiple bends.
3Device complexity
If multiple gas flow channels are arranged in the same plane, then gas distribution is simplified, but gas flow interference increases
Solution Approach 1:
The patent resolves gas flow interference by distributing second portions of different gas flow channels across the thickness direction. This vertical separation in the z-direction prevents lateral mixing and interference between different gas streams while maintaining a relatively simple integrated channel design within the base.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances gas distribution efficiency and responsiveness, minimizing residual gas impact on substrate processing, and optimizing gas supply to specific regions within the chamber.
Implementation Method 1
Each of the plurality of gas flow channels includes a first portion extending in a thickness direction of the base, and a second portion communicating with the first portion and extending in a direction orthogonal to the thickness direction
Data Source
AI summary
A shower plate includes a base that is an integrally formed body including a plurality of gas flow channels therein. Each of the plurality of gas flow channels includes a first portion extending in a thickness direction of the base, and a second portion communicating with the first portion and extending in a direction orthogonal to the thickness direction. Second portions belonging to different gas flow channels of the plurality of gas flow channels are arranged at mutually different positions in the thickness direction.