Showerhead Cooling Layout for High-RF Plasma Processing
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Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in maintaining temperature control of the showerhead due to rapid temperature rises caused by high RF plasma power, leading to inefficient cooling and loss of temperature control.
Innovation Solution
A substrate processing apparatus is designed with a cooling unit comprising a water tank, fan, and fins, where water circulates through cooling pipes to cool the air flow generated by the fan, which is directed into the substrate reaction chamber to efficiently cool the showerhead, and a controller adjusts fan rotation and fin angle based on temperature thresholds to maintain temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If high RF plasma power is applied to generate plasma in the showerhead, then plasma generation capability is improved, but showerhead temperature rises rapidly causing loss of temperature control
Solution Approach 1:
The cooling air is pre-cooled by passing it through cooling pipes with water circulation before being supplied to the showerhead. This preliminary cooling action ensures that even when high RF power is applied, the showerhead temperature remains controlled because the incoming cooling air is already at a low temperature, providing immediate cooling effect.
Solution Approach 2:
Cooling air acts as an intermediary medium between the heat source (showerhead) and the cooling system (water circulation). The air flows through the showerhead, absorbing excess heat, and is then cooled by the water circulating in the cooling pipes, creating an effective heat transfer pathway that maintains temperature control during high power operation.
2Reliability
If conventional cooling methods are used with separate heat supply and cooling devices, then temperature control is attempted, but cooling efficiency is insufficient to prevent rapid temperature rises
Solution Approach 1:
The cooling system merges the cooling air generation function with the water circulation cooling system. Instead of using separate conventional cooling devices, the invention combines these functions by having the cooling air pass through water-cooled pipes, creating an integrated system that achieves superior cooling efficiency and reliable temperature control.
Solution Approach 2:
The invention uses hydraulic cooling (water circulation through cooling pipes) combined with pneumatic cooling (air flow through the showerhead). This combination of fluid-based cooling methods creates a highly efficient thermal management system that can handle the heat loads from high RF plasma power without sacrificing reliability or productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively maintains the showerhead temperature within a certain range by enhancing cooling performance, preventing rapid temperature rises and ensuring consistent process gas characteristics.
Implementation Method 1
a fan configured to generate an air flow; a plurality of cooling pipes configured to circulate the water from the tank and positioned to pass through in front of the fan; wherein the water passing through the cooling pipes cools down the air flow generated by the fan
Implementation Method 2
a plurality of cooling pipes configured to circulate the water from the tank and positioned to pass through in front of the fan; wherein the water passing through the cooling pipes cools down the air flow generated by the fan
Data Source
AI summary
A substrate processing apparatus may be presented. The apparatus comprising a substrate reaction chamber configured to hold and process a substrate, a remote plasma unit for generating a radical gas to clean the substrate reaction chamber, a cooling unit, the cooling unit comprising: a tank configured to store water for cooling, a fan configured to generate an air flow, a plurality of fins placed in front of the fan, a plurality of cooling pipes configured to circulate the water from the tank and positioned to pass through in front of the fan, wherein the water passing through the cooling pipes cools down the air flow generated by the fan.