Showerhead Heat Transfer Plate Independent Flow Paths
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Solution Overview
Problem
Conventional substrate processing showerheads often fail to provide uniform thermal profiles, leading to non-uniform processing results due to inadequate cooling channel configurations.
Innovation Solution
A heat transfer system with a heat transfer plate featuring independent flow paths, a supply conduit system, and a return conduit system, which are disposed within an imaginary cylindrical projection above the heat transfer plate, to enhance thermal uniformity across the substrate-facing surface of the showerhead.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional cooling channels are used in showerhead, then the structure is simple, but the temperature uniformity across substrate-facing surface is insufficient
Solution Approach 1:
The cooling system is divided into multiple independent flow paths within the showerhead, with each path containing series-connected cooling channels. This segmentation allows different regions of the substrate-facing surface to receive customized cooling flows, achieving uniform temperature distribution across the entire surface while maintaining manageable structural complexity through modular design
Solution Approach 2:
Different regions of the showerhead are equipped with cooling channels having different configurations (series-connected vs. other arrangements) to provide locally optimized cooling. This allows tailored thermal management for different zones of the substrate-facing surface, ensuring uniform temperature despite varying local heat generation patterns
2Manufacturing precision
If cooling channels are provided to maintain predetermined temperature profile, then temperature control is attempted, but the temperature profile remains non-uniform leading to non-uniform processing results
Solution Approach 1:
The showerhead cooling system is segmented into multiple independent flow paths, each with series-connected cooling channels configured to deliver uniform temperature distribution to specific regions. This segmentation enables precise control of thermal profiles across different zones, ensuring uniform processing results by addressing local temperature variations independently
Solution Approach 2:
The system incorporates temperature sensing and control mechanisms that monitor the thermal profile across the substrate-facing surface and adjust cooling flow distribution accordingly. This feedback loop ensures uniform temperature maintenance by detecting and correcting temperature deviations in real-time, directly improving processing uniformity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively controls and maintains a uniform temperature profile across the showerhead, improving the consistency and quality of substrate processing by increasing the flow rate of the heat transfer medium and minimizing temperature variations.
Implementation Method 1
a heat transfer plate having a first diameter and a plurality of independent flow paths disposed within the heat transfer plate, each flow path having a first inlet and a first outlet
Implementation Method 2
a supply conduit system having a second inlet fluidly coupled to a plurality of second outlets, wherein each second outlet is fluidly coupled to a corresponding first inlet of the heat transfer plate
Data Source
AI summary
Apparatus for controlling thermal uniformity of a substrate-facing surface of a showerhead are provided herein. In some embodiments, a heat transfer system includes a heat transfer plate having a first diameter and a plurality of independent flow paths disposed within the heat transfer plate, each flow path having a first inlet and a first outlet; a supply conduit system having a second inlet fluidly coupled to a plurality of second outlets, wherein each second outlet is fluidly coupled to a corresponding first inlet of the heat transfer plate; and a return conduit system having a third outlet fluidly coupled to a plurality of third inlets, wherein each third inlet is fluidly coupled to a corresponding first outlet of the heat transfer plate, wherein the supply conduit system and the return conduit system are each disposed within an imaginary cylindrical projection above the heat transfer plate.