Showerhead Outer Plate Geometry for Particle Deflection

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Solution Overview

Problem

Existing substrate processing technologies face challenges in preventing contamination and extending the maintenance period of components during semiconductor fabrication processes, particularly due to issues with particle movement and contamination within the substrate processing apparatus.

Innovation Solution

A showerhead design featuring an inner plate with gas holes and an outer plate with specific angular surfaces to prevent inward particle movement and induce outward movement, combined with a substrate processing apparatus that includes a quartz outer ring and a heating liner ring, which helps in maintaining low temperatures and uniform plasma distribution, thereby reducing contamination and extending maintenance periods.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a conventional showerhead design is used, then gas distribution is achieved, but particles can move inward and contaminate the substrate

Engineering Contradiction:

Improvesubstrate contaminationVSAvoidparticle prevention capability

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

The outer plate is designed with an asymmetric inclined surface that slopes downward from the inner to outer circumference. This asymmetric geometry creates a particle deflection effect where particles are directed outward away from the substrate, preventing contamination while maintaining gas distribution functionality

Inventive Principle:

Principle #4Asymmetry

Solution Approach 2:

The inclined surface of the outer plate creates a curved path for particle movement. By utilizing this curvature, particles that may enter the showerhead are guided along the inclined surface and expelled outward, transforming the linear particle movement into a curved trajectory that prevents substrate contamination

Inventive Principle:

Principle #14Spheroidality (Curvature)

2Ease of manufacture

If the showerhead structure is simplified, then manufacturing is easier, but particle control and contamination prevention are reduced

Engineering Contradiction:

Improveshowerhead fabricationVSAvoidparticle contamination

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The showerhead is divided into two separate plates: an inner plate with gas holes and an outer plate with the inclined surface. This segmentation allows each component to be manufactured independently using standard processes, while the assembled structure provides the particle control functionality that would be difficult to achieve in a simplified single-piece design

Inventive Principle:

Principle #1Segmentation

3Manufacturing precision

If the inner plate bottom surface is positioned higher, then plasma distribution may improve, but particles can more easily reach the substrate

Engineering Contradiction:

Improveplasma uniformityVSAvoidparticle contamination

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The outer plate with its inclined surface acts as an intermediary barrier between the inner plate and the substrate. Even when the inner plate bottom surface is positioned higher for better plasma distribution, the outer plate's inclined surface intercepts and redirects particles outward, preventing them from reaching the substrate

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents substrate contamination, increases the yield of semiconductor processing, and extends the maintenance period of components by ensuring that particles are deflected outward and plasma is uniformly distributed, enhancing the processing efficiency and component longevity.

Implementation Method 1

an outer plate at least partially surrounding the inner plate, the outer plate having a ring shape with an axis that extends in the first direction, where the outer plate may include a first inner surface that extends downward and forms an acute angle with a line corresponding to the first direction

Methodology Applied

Scientific EffectParticle deflection:

Implementation Method 2

an inner plate including at least one gas hole that penetrates the inner plate in a first direction

Methodology Applied

Scientific EffectGas distribution:

Implementation Method 3

a heating liner ring that at least partially surrounds the outer ring

Methodology Applied

Scientific EffectThermal heating: Heating

Data Source

PatentUS20240105426A1Showerhead and substrate processing apparatus including the same

Publication Date: 2024.03.28 SAMSUNG ELECTRONICS CO LTD

AI summary

A showerhead includes an inner plate including at least one gas hole that penetrates the inner plate in a first direction, and an outer plate at least partially surrounding the inner plate, the outer plate having a ring shape with an axis that extends in the first direction, where the outer plate includes a first inner surface that extends downward and forms an acute angle with a line corresponding to the first direction, a first bottom surface that extends outward from the first inner surface, and a first outer surface that extends upward from the first bottom surface, and where a first angle between the first inner surface and a line corresponding to the first direction is greater than a second angle between the first outer surface of the outer plate and a line corresponding to the first direction.