Showerhead Plenum Gas Distribution Eliminates Cross-Drill Holes
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Solution Overview
Problem
Showerheads with complex networks of cross-drill holes for distributing gases and vapors in deposition tools are costly to manufacture, prone to contamination, and result in non-uniform distribution and condensation issues, leading to substrate defects.
Innovation Solution
A showerhead design with separate plenums and chambers that distribute gases and vapors through holes in a faceplate without the need for cross-drill holes, using protrusions and concentric patterns to facilitate lateral flow, reducing machining complexity and contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a complex network of cross-drill holes is used to distribute gas internally within the showerhead, then gas distribution capability is achieved, but manufacturing complexity and cost increase significantly
Solution Approach 1:
The internal volume of the showerhead is divided into multiple plenums (first plenum, second plenum, etc.) that are separated by partitions. Each plenum has its own set of holes in the faceplate, allowing independent gas distribution control. This segmentation eliminates the need for complex cross-drill hole networks while achieving comprehensive gas distribution across the substrate surface.
2Adaptability or versatility
If cross-drill holes are used for gas distribution, then gas can be delivered to the substrate, but contamination from metal shavings and drilling oil remains in the holes
Solution Approach 1:
The invention removes the problematic cross-drill hole network entirely and replaces it with plenums that have simple axial holes through the faceplate. This extraction of the harmful cross-drill structure eliminates the source of contamination (metal shavings, drilling oil) while preserving the essential gas delivery function through the simplified plenum-hole configuration.
3Adaptability or versatility
If gas flows through multiple cross-drill holes at 90 degrees, then lateral distribution is achieved, but temperature drops and condensation occurs
Solution Approach 1:
Instead of forcing gas to turn 90 degrees through cross-drill holes, the invention uses plenums where gas flows axially through simple holes in the faceplate. The lateral distribution is achieved through the radial arrangement of holes in the faceplate rather than through angular turns, eliminating temperature drops and condensation while maintaining distribution capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies machining, reduces contamination, ensures uniform gas distribution, and minimizes condensation, resulting in improved substrate quality and reduced defects.
Implementation Method 1
gas(es) and/or vapor(s) is/are supplied by and flow into the processing chamber via (a) the first plenum, (b) laterally within the first plenum chamber relative to the faceplate of the showerhead and (c) from the first plenum chamber into the processing chamber via the first set of holes
Data Source
AI summary
A deposition tool including a processing chamber, a substrate holder for holding a substrate to be processed within the processing chamber and a showerhead having a faceplate for distributing a first and/or second gas(es) and/or vapor(s) into the processing chamber. The showerhead includes first and second plenums, first and second chambers, each provided behind a backside of the faceplate, and first and second sets of holes, both formed through the faceplate of the showerhead, and in fluid communication with the first and second chambers respectively.