Semiconductor Showerhead Gas Mixing via Segmented Nozzle
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Solution Overview
Problem
Conventional showerhead assemblies in semiconductor manufacturing face challenges in achieving high reaction mixture gas density due to restricted nozzle layout designs, which hinder precise semiconductor deposition processes.
Innovation Solution
A showerhead assembly design featuring a male board and a main board with a recessed gas outlet configuration that mixes two gases within a channel, allowing for efficient mixing and release through a single nozzle, enabling a compact high-density nozzle layout.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple outlets are provided in a single nozzle or different gases are released through different nozzles, then gas mixing and particle prevention are achieved, but the nozzle occupies a relatively large area of the showerhead
Solution Approach 1:
The nozzle is segmented into multiple functional sections: a central outlet for reaction gas and surrounding outlets for purge gas. This segmentation allows different gases to be delivered through distinct pathways while maintaining a compact overall nozzle structure, preventing particle accumulation without occupying excessive showerhead area.
Solution Approach 2:
The purge gas outlets are arranged concentrically around the central reaction gas outlet, creating a nested configuration where smaller outlets are positioned within the spatial envelope of larger ones. This nesting enables multiple gas delivery functions within a minimized nozzle footprint.
2Quantity of substance
If conventional nozzle layouts are used, then gas delivery is achieved, but the nozzle density cannot be increased to meet the required gas substance density or uniformity within the reaction area
Solution Approach 1:
Multiple gas delivery functions are merged into a single integrated nozzle unit. The central outlet and surrounding outlets are combined in one nozzle structure, allowing high gas substance density to be achieved at specific locations while the overall nozzle layout remains relatively simple and manageable.
Solution Approach 2:
The nozzle design provides different gas delivery characteristics at different locations: the central outlet delivers reaction gas with specific flow properties, while the surrounding outlets deliver purge gas with different flow properties. This local differentiation achieves required gas substance density and uniformity without requiring complex overall nozzle layout.
3Area of stationary object
If a compact nozzle layout is attempted, then showerhead size restriction is addressed, but achieving high reaction mixture gas density becomes difficult
Solution Approach 1:
The nozzle design transitions from a two-dimensional planar layout to a three-dimensional concentric arrangement. By stacking outlets in radial and axial dimensions rather than spreading them out in a single plane, the design achieves compact showerhead size while maintaining high reaction mixture gas density through vertical and radial layering of gas delivery pathways.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances gas density and uniformity in the reaction area, facilitating more precise semiconductor manufacturing by allowing for a higher density of gas substances and improved plasma or thermally controlled reactions.
Implementation Method 1
the injecting terminal extends from the bottom surface of the male board to inject a first gas
Implementation Method 2
the recess is configured to receive the first gas from the male board such that the first gas and the second gas are mixed within the recess
Implementation Method 3
the first gas and the second gas are mixed within the recess and released via the gas outlet
Data Source
AI summary
The invention discloses a showerhead assembly including a male board with a top surface and a bottom surface and having an injector extending from the bottom surface to inject a first gas; and a female board with a top surface and a bottom surface and having a cavity formed on the top surface. The cavity is communicatively coupled to a gas outlet through which a second gas is guided toward to the outlet. The cavity is configured to receive the first gas from the male board such that the first gas and the second gas mix and then is exhausted via the gas outlet.