Shunt Switch Arc Recovery Plasma Chamber Power Supply
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current plasma chamber power supply over-voltage protection methods are either too complex, expensive, or inefficient, as they often require large passive components to handle frequent plasma arcs, which dissipate energy rather than utilizing it.
Innovation Solution
A system and method using a shunt switch with pulse parameter values to mitigate over-voltage conditions by diverting current during plasma arcs and releasing stored energy in controlled pulses, preventing damage to the power supply and plasma chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If passive components such as RC snubber circuits, transient voltage suppressor circuits, or metal oxide varistors are used to dissipate energy, then over-voltage protection is provided, but the components must be large to handle frequent plasma arcs and energy is dissipated rather than used
Solution Approach 1:
The patent converts the harmful over-voltage energy into useful stored energy by using an energy storage component (capacitor) to capture the energy from plasma arcs instead of dissipating it through passive components. This eliminates the need for large protective components while providing over-voltage protection.
Solution Approach 2:
The patent changes the energy handling approach from dissipation to storage by altering the electrical parameters - using a capacitor to store energy at controlled voltage levels rather than allowing uncontrolled voltage spikes, thereby protecting the system without requiring large protective components.
2Reliability
If passive components are used to dissipate energy, then over-voltage protection is provided, but energy is dissipated rather than used by the power supply
Solution Approach 1:
The patent transforms the harmful over-voltage condition into a beneficial energy storage opportunity by capturing arc energy in a capacitor. This converts wasted energy into usable stored energy that can be released in controlled pulses to maintain plasma power during arcs.
Solution Approach 2:
Instead of discarding energy through dissipation, the patent recovers energy from plasma arcs by storing it in a capacitor. The stored energy is then recovered and released in controlled pulses to maintain system operation, eliminating energy loss.
3Loss of energy
If circuits are designed to use energy from plasma arcs by transferring it back to an input bus, then energy utilization is improved, but the designs are quite complex and expensive
Solution Approach 1:
The patent extracts the energy utilization function from complex input bus circuits and implements it locally at the output stage using a simple capacitor. This extraction simplifies the overall circuit by eliminating the need for complex energy transfer circuits while maintaining energy utilization benefits.
Solution Approach 2:
The patent introduces a simple capacitor as an intermediary energy storage device between the output stage and plasma chamber, replacing complex energy transfer circuits. This intermediary provides simple, low-cost energy storage and controlled release without the complexity of input bus energy recovery circuits.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively reduces the risk of over-voltage damage by utilizing energy from plasma arcs through controlled pulses, enhancing efficiency and reducing the need for large, costly components.
Implementation Method 1
energy can be circulated within the energy storing components of the power supply for a period of time using a shunt switch in order to extinguish the plasma arc
Implementation Method 2
an output filter stage that consists of energy storing components such as inductors and capacitors
Implementation Method 3
an output filter stage that consists of energy storing components such as inductors and capacitors
Implementation Method 4
After the plasma arc is extinguished, however, the energy circulated within the power supply can cause, for example, an over-voltage condition that can damage the power supply and/or plasma chamber if the energy is released to the plasma chamber
Data Source
AI summary
A system and method for over- voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.