Shutter Abnormality Detection via Vibration Analysis

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Solution Overview

Problem

Existing shutter apparatuses in manufacturing processes, such as exposure and molding apparatuses, face challenges in promptly detecting abnormal operations beyond current deficits in motors, including issues with shutter blades and motor shafts, which can lead to malfunctions due to deformation or external forces, necessitating a more comprehensive abnormality detection system.

Innovation Solution

An abnormality detection apparatus utilizing a processor and memory to employ an abnormality detection model that analyzes measurement data from sensors, calculating feature values and Mahalanobis distances to determine abnormal operations, allowing for timely maintenance and preventing damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If only current deficit detection in motor is performed, then the detection system remains simple, but abnormal operations originating from other parts such as shutter blade or motor shaft cannot be detected

Engineering Contradiction:
Improvedetection coverageVSAvoiddetection system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The vibration detection apparatus uses a single vibration detection device that serves multiple functions: detecting abnormalities in the motor, shutter blade, motor shaft, and other parts. By making the detection system universal rather than specialized for each component, the patent achieves comprehensive detection coverage without proportionally increasing system complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent introduces vibration as an intermediary parameter that indirectly reflects the state of multiple components. Instead of directly monitoring each component (motor current, shutter blade position, motor shaft alignment), the system uses vibration signals as a mediator that captures abnormal operations across all these components, simplifying the detection architecture while maintaining reliability

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If comprehensive abnormality detection is implemented, then detection accuracy improves, but response time may be delayed due to complex analysis

Engineering Contradiction:
Improveabnormality detection accuracyVSAvoiddetection response time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system continuously monitors vibration signals and pre-processes them to extract features that indicate abnormal operations. By preparing the data in advance and maintaining a baseline of normal operation characteristics, the system can quickly compare real-time signals against this prepared information, enabling rapid detection without complex real-time analysis

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent leverages the physical phenomenon of vibration itself as the detection mechanism. Abnormal operations in the shutter apparatus generate characteristic vibration patterns that can be detected and identified through their frequency and amplitude characteristics. This physical approach enables intuitive and rapid detection of abnormalities without requiring complex computational analysis

Inventive Principle:
Principle #18Mechanical vibration

Data Source

PatentUS12155938B2Abnormality detection apparatus, abnormality detection method, storage medium, shutter apparatus, exposure apparatus, and method for manufacturing article
Publication Date: 2024.11.26 CANON KK
  • US12155938B2 patent drawing
  • US12155938B2 patent drawing
  • US12155938B2 patent drawing

AI summary

An abnormality detection apparatus for detecting an abnormal operation in a shutter apparatus configured to block light includes one or more memories, and one or more processors that cooperate with the one or more memories to detect the abnormal operation using an abnormality detection model that outputs determination data for detecting the abnormal operation in a case where information about measurement data on the shutter apparatus is input to the abnormality detection model.