Lithography Shutter Blade Rigidity via Non-Planar Hub
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Solution Overview
Problem
Existing shutter devices in lithography apparatuses face challenges in improving the rigidity of shutter blades while maintaining or reducing their weight, which is necessary for increasing rotation speed and throughput.
Innovation Solution
The shutter device incorporates a hub with a holding surface that includes both first and second regions, allowing the shutter blade to contact these regions while being fixed. This configuration enables deformation of the shutter blade, thereby enhancing its rigidity without increasing weight.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the weight of the shutter blade is reduced to improve rotation speed, then the rotation speed increases, but the rigidity of the shutter blade lowers
Solution Approach 1:
The patent applies local quality by creating a non-planar holding surface with specific three-dimensional features (convex/concave portions) at localized regions of the hub. This allows the shutter blade to be deformed only in specific areas to enhance rigidity, while the rest of the blade maintains its lightweight structure. The localized deformation through the non-planar surface contact provides structural reinforcement exactly where needed without adding overall weight to the blade assembly.
Solution Approach 2:
The patent transitions from a two-dimensional planar holding surface to a three-dimensional non-planar holding surface. By introducing vertical dimensionality through convex and concave portions, the hub creates multiple contact points with the shutter blade that generate deformation forces. This dimensional change allows the blade to be pre-deformed into a curved shape that enhances its rigidity and resistance to bending during rotation, solving the contradiction between lightweight construction and structural strength.
2Ease of manufacture
If pressing portions are positioned away from bolts to avoid interference, then assembly is easier, but the deformation force applied to the shutter blade is limited
Solution Approach 1:
The patent resolves this contradiction by moving the pressing action into the vertical dimension through non-planar surface features. The convex and concave portions of the holding surface create pressing forces at multiple heights and angles, allowing deformation to occur without requiring horizontal space near the bolt locations. This three-dimensional pressing approach maintains full deformation force capability while keeping the bolt installation path clear and unobstructed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved rigidity of the shutter blade allows for faster rotation speeds, enhancing the throughput of the exposure apparatus while maintaining the necessary structural integrity.
Implementation Method 1
the shutter blade is deformed, thereby improving the rigidity of the shutter blade
Data Source
AI summary
A shutter device for passing and blocking light, includes a rotation source configured to rotationally drive a rotation shaft, a hub connected to the rotation shaft, and a shutter blade fixed to the hub. The hub includes a holding surface that holds the shutter blade, and the holding surface includes a first region belonging to a predetermined plane and a second region separated from the predetermined plane. The shutter blade contacts the first region and the second region while being fixed to the hub.