Shutter Disk System with Atmospheric Storage
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Solution Overview
Problem
Conventional cluster tools face reduced mechanical throughput due to the need for ramping up, performing, and ramping down deposition processes, and they require expensive high-vacuum space for shutter disk storage, increasing system cost and footprint.
Innovation Solution
The introduction of a shutter disk system that includes a body with multiple faces, a base, and a top, featuring an interior volume with an interlock region for receiving shutter disks and an operation region separated by an isolator plate, allowing for routine maintenance and switching of shutter disks without breaking vacuum.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If shutter disks are stored in high-vacuum regions of the cluster tool, then vacuum integrity is maintained, but system footprint and cost increase
Solution Approach 1:
The shutter disk storage function is extracted from the high-vacuum process chamber region and placed in a separate atmospheric environment storage system. This allows the vacuum system to maintain its integrity while the storage system operates independently at atmospheric pressure, eliminating the need for expensive high-vacuum storage space.
Solution Approach 2:
A transfer mechanism acts as an intermediary between the atmospheric storage system and the vacuum process chamber. This intermediary enables shutter disks to be moved from atmospheric storage to the vacuum chamber without compromising vacuum integrity, as the transfer occurs through a controlled interface rather than direct exposure.
2Manufacturing precision
If deposition processes are performed sequentially in multiple PVD chambers, then process quality is maintained, but mechanical throughput decreases
Solution Approach 1:
Shutter disks are pre-positioned in the storage system before vacuum operations begin. This preliminary preparation allows rapid deployment of shutter disks during deposition processes without requiring time-consuming vacuum breaking or manual intervention, thereby maintaining process quality while improving throughput.
Solution Approach 2:
The system implements dynamic shutter disk management where multiple shutter disks can be rapidly exchanged between storage and process chambers during operation. This dynamic capability allows continuous deposition processes across multiple chambers without sequential interruptions, maintaining quality while enhancing mechanical throughput.
3Ease of operation
If vacuum is broken for shutter disk maintenance, then access is enabled, but system downtime increases
Solution Approach 1:
The system is segmented into separate atmospheric storage and vacuum process regions. This segmentation allows maintenance activities to be performed on shutter disks in the atmospheric storage region independently of the vacuum system, enabling easy access for maintenance without requiring vacuum breaking and minimizing system downtime.
Data Source
AI summary
The present disclosure provides shutter disk systems. The shutter disk systems include a body including a plurality of faces, a base, and a top. The body includes an interior volume. The interior volume includes an interlock region configured to receive at least one shutter disk. The interior volume includes an operation region adjacent to the interlock region, where the operational region is separate from the interlock region by an isolator plate. A shutter disk stack is disposed in the operational region. The shutter disk stack includes at least a storage rack configured to receive two or more shutter disks. A first door is disposed on a face of the plurality of faces proximal to the operational region. A second door is disposed proximal to the interlock region. A third door is disposed proximal to a portion of the interlock region and a portion of the operational region.