SiC Single Crystal Growth via Surface Convection Control

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Solution Overview

Problem

Existing methods for producing SiC single crystals face challenges in achieving high-quality crystals due to convection and whirlpool issues in liquid phase growth, which affect crystal quality and limit the size of the crystals that can be produced.

Innovation Solution

The method involves actively controlling the flow of the raw material solution to align with the step developing direction on the crystal growth surface, allowing for the formation of macrosteps and subsequent conversion of defects, thereby smoothing the surface and reducing defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If convection control members are disposed in the liquid tub to suppress convection, then crystal quality is improved, but the space in the liquid tub is reduced making it difficult to produce large single crystals

Engineering Contradiction:
Improvecrystal qualityVSAvoidspace in liquid tub
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The convection control function is extracted from the liquid tub environment and transferred to the crystal growth surface itself. By forming a convex portion on the crystal growth surface that acts as a convection control member, the solution flow is controlled at the interface rather than introducing separate control elements into the bulk liquid, thus maintaining crystal quality without reducing available growth space.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The convection control mechanism is moved from a three-dimensional space-filling element to a two-dimensional surface feature. The convex portion on the crystal growth surface controls convection patterns by modifying flow at the liquid-crystal interface, eliminating the need for volumetric convection control members that would occupy space within the liquid tub.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Length of moving object

If the liquid tub is increased in size to accommodate larger crystals, then crystal size is improved, but the apparatus size increases

Engineering Contradiction:
Improvecrystal sizeVSAvoidapparatus size
Core Design Contradiction:
Length of moving objectVSLength of stationary object

Solution Approach 1:

The crystal growth surface itself provides the convection control function through its convex portion, eliminating the need for separate convection control members. This self-service approach allows larger crystal growth areas without proportionally increasing apparatus complexity or size, as no additional control elements are required.

Inventive Principle:
Principle #25Self-service

3Manufacturing precision

If raw material solution flow is completely eliminated to suppress convection, then crystal quality is improved, but crystal growth cannot proceed without forced flow

Engineering Contradiction:
Improvecrystal qualityVSAvoidcrystal growth
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The flow control is applied locally at the crystal growth surface rather than globally throughout the entire liquid tub. The convex portion creates a localized flow pattern that suppresses detrimental convection near the growth interface while allowing bulk solution flow to continue, maintaining both crystal quality and growth productivity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Instead of completely eliminating solution flow, the invention applies partial flow control only where necessary at the crystal growth surface. The convex portion modifies flow locally to suppress convection-induced defects while permitting sufficient bulk flow to deliver nutrients and maintain crystal growth rates.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of SiC single crystals with a smooth surface and a reduced number of defects, improving crystal quality and allowing for larger crystal growth without the need for complex apparatus modifications.

Implementation Method 1

when the raw material solution is allowed to flow in the same direction as a step developing direction, step bunching occurs on the crystal growth surface

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 2

when the raw material solution is allowed to flow in a direction opposite to the step developing direction, step bunchings on the crystal growth surface are reduced and thus the step heights can be reduced, thereby smoothing the crystal growth surface

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

growing a crystal from a seed crystal in a liquid phase (so-called a liquid phase growth method)

Methodology Applied
Scientific EffectCrystallisation: Crystallisation

Data Source

PatentEP2889397B1Sic single crystal producing method
Publication Date: 2019.04.03 NAGOYA UNIVERSITY
  • EP2889397B1 patent drawingFigure 1
  • EP2889397B1 patent drawingFigure 2~3
  • EP2889397B1 patent drawingFigure 4~5

AI summary

Provided is a crystal producing apparatus capable of producing a single crystal having excellent quality. The crystal producing apparatus for growing a single crystal on a crystal growth surface of a seed crystal in a raw material solution by a liquid phase growth method, includes: a liquid tub (20) which accommodates a raw material solution (29); a crystal holding element (3) which holds a seed crystal (1); and a solution flowing element (25) which allows the raw material solution (29) in the liquid tub (20) to flow. Among these, the crystal holding element (3) is able to hold the seed crystal (1) in the liquid tub (20) and is movable in at least a partial region on an xy plane perpendicular to a z-axis that extends in a depth direction of the liquid tub (20).