SiC Semiconductor Device Short-Circuit Tolerance

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Solution Overview

Problem

Silicon carbide semiconductor devices face challenges in short-circuit tolerance, as they are prone to breakdown when short-circuited, leading to high current flow and potential device failure, necessitating an improvement in the time from short-circuit state to breakdown.

Innovation Solution

A semiconductor device design incorporating multiple silicon carbide regions of varying conductivity types and impurity concentrations, along with a gate insulation layer, is implemented to enhance short-circuit tolerance by managing the depletion layer and on-state resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a simple silicon carbide structure is used, then manufacturing is easier, but short-circuit tolerance is poor

Engineering Contradiction:
Improveshort-circuit toleranceVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The silicon carbide structure is divided into multiple regions with different conductivity types (first conductivity type and second conductivity type) and different impurity concentrations. This segmentation creates distinct functional zones that manage depletion layer distribution during short-circuit conditions, improving tolerance while maintaining manufacturability through systematic regional differentiation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the silicon carbide structure are assigned different impurity concentrations and conductivity types to optimize local electrical characteristics. The first and second conductivity type regions are strategically positioned to control depletion layer formation locally, ensuring that each region contributes specifically to short-circuit tolerance enhancement.

Inventive Principle:
Principle #3Local quality

2Loss of energy

If higher impurity concentration is used, then on-state resistance decreases, but breakdown voltage capability is reduced

Engineering Contradiction:
Improveon-state resistanceVSAvoidbreakdown voltage capability
Core Design Contradiction:
Loss of energyVSStrength

Solution Approach 1:

The structure employs regions with different impurity concentrations positioned at specific locations. Regions with higher impurity concentrations are placed where low on-state resistance is critical, while regions with lower impurity concentrations are positioned to maintain high breakdown voltage capability. This local differentiation allows simultaneous optimization of both parameters.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The silicon carbide structure functions as a composite material system with multiple conductivity types and impurity concentrations integrated into a single device. This composite approach allows the structure to exhibit both low on-state resistance (from high impurity regions) and high breakdown voltage capability (from low impurity regions) simultaneously.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively improves short-circuit tolerance by limiting current flow and extending the time to device breakdown, reducing on-state resistance and maintaining threshold voltage control.

Implementation Method 1

a gate insulation layer between the gate electrode and the second silicon carbide region and between the gate electrode and the third silicon carbide region

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Implementation Method 2

managing the depletion layer and on-state resistance

Methodology Applied
Scientific EffectDepletion layer formation: Electric Field

Data Source

PatentUS10186572B2Semiconductor device
Publication Date: 2019.01.22 KK TOSHIBA
  • US10186572B2 patent drawing
  • US10186572B2 patent drawing
  • US10186572B2 patent drawing

AI summary

A semiconductor device includes first, second, and gate electrodes. A first silicon carbide region of a first type is between the first and second electrodes and between the gate and second electrodes. Second and third silicon carbide regions of a second type are between the first electrode and first silicon carbide region. A portion of the first silicon carbide region is between the second and third silicon carbide regions. A fourth silicon carbide region of the first type is between the first electrode and second silicon carbide region. A fifth silicon carbide region of the first type is between the first electrode and third silicon carbide region. An insulation layer is between the gate electrode and second and third silicon carbide regions and sixth silicon carbide region of the second type. A second portion of the first silicon carbide region is between the second electrode and sixth silicon carbide region.