Movable Core Member for Silicon Carbide Ingot Stress Relief

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Solution Overview

Problem

Existing methods for producing large-diameter single-crystal silicon carbide ingots face challenges such as poor adhesive strength between the seed crystal and the holder, leading to defects like warpage and compressive stress, which limits the growth of high-quality ingots.

Innovation Solution

An apparatus with a crucible lid assembly that includes a movable core member and a seed crystal fixing unit, allowing for the relief of thermal and compressive stress by spacing the core member from the lid assembly and using a graphite core member to facilitate heat release, thereby reducing defects in ingot growth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a seed crystal is attached to a holder using adhesive, then the seed crystal can be fixed during growth, but the adhesive strength is poor and fine pores form at the interface, limiting the growth of high-quality large-diameter silicon carbide single-crystal ingots

Engineering Contradiction:
Improveadhesive strengthVSAvoidinterface quality
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The invention removes the adhesive layer from the interface between the seed crystal and holder, extracting the harmful element that causes poor bonding and pore formation. The seed crystal is directly placed on the holder without adhesive, eliminating the source of interface defects while maintaining sufficient mechanical support during growth.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention introduces a graphite layer as an intermediary between the seed crystal and holder. This graphite intermediary provides thermal contact for heating while preventing direct adhesive bonding, serving as a mediator that enables both thermal transfer and mechanical support without the harmful adhesive layer.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Stability of the object's composition

If the seed crystal is held firmly to prevent movement, then positioning stability is improved, but thermal and compressive stress cannot be relieved, causing warpage and defects in the ingot

Engineering Contradiction:
Improvepositioning stabilityVSAvoidthermal and compressive stress
Core Design Contradiction:
Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The invention introduces a movable core member that can dynamically adjust its position within the growth chamber. This dynamic element allows the system to maintain positioning stability while providing stress relief through controlled movement, preventing warpage by accommodating thermal expansion and compressive stress during ingot growth.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention changes the physical parameters of the growth chamber by introducing a movable core member that can alter the volume and pressure conditions. This parameter change enables stress relief while maintaining stable positioning, as the core member's movement adjusts the internal environment to accommodate thermal and mechanical stresses without compromising ingot quality.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus enables the production of large-diameter silicon carbide single-crystal ingots with fewer defects, achieving a surface density of 10000 ea/cm² or less and maintaining ingot quality by effectively managing thermal and mechanical stresses during growth.

Implementation Method 1

using a graphite core member to facilitate heat release

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

relief of thermal and compressive stress by spacing the core member from the lid assembly

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentEP3666934B1Apparatus for producing ingot and method for producing silicon carbide ingot using the apparatus
Publication Date: 2023.10.11 SENIC INC
  • EP3666934B1 patent drawingFigure 1~2
  • EP3666934B1 patent drawingFigure 3
  • EP3666934B1 patent drawingFigure 4

AI summary

An apparatus for producing an ingot includes a crucible body having an opening and in which raw materials are accommodated, and a lid assembly located at the opening and having a portion fixed to the crucible body. The lid assembly includes a placement hole having open upper and lower ends, a frame member arranged along a periphery of the opening while surrounding a periphery of the placement hole, and a core member located in the placement hole and movable upward and downward with respect to the frame member..