SiC JBS Diode with Polysilicon Barrier for Leakage Reduction

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Solution Overview

Problem

Conventional silicon carbide Schottky diodes face issues with reverse leakage currents and catastrophic failure under high reverse voltage, limiting their voltage blocking ability and switching speed, particularly compared to silicon PIN diodes.

Innovation Solution

The development of a junction barrier Schottky (JBS) diode structure incorporating a p-type polysilicon region forming a P-N heterojunction with the drift region, where the Schottky junction turns on at a lower forward voltage than the P-N heterojunction, and a guard ring termination region is used to manage electric field crowding and reduce reverse leakage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If a Schottky contact is formed directly on the n- drift layer to achieve fast switching speed, then switching speed is improved, but reverse leakage current increases and voltage blocking capability deteriorates

Engineering Contradiction:
Improveswitching speedVSAvoidvoltage blocking capability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The device is segmented into multiple functional regions: a Schottky contact region for fast switching and a JBS region with p+ barrier layers for voltage blocking. The p+ barrier layers are distributed across the drift layer to create localized junctions that prevent depletion region interaction with the surface, thereby reducing reverse leakage while maintaining fast switching capability in the Schottky region.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the device are given different properties: the Schottky contact region is optimized for low forward voltage drop and fast switching, while the JBS regions with p+ barrier layers are optimized for high voltage blocking and low reverse leakage. This local differentiation allows the device to exhibit both fast switching and high reliability characteristics in their respective regions.

Inventive Principle:
Principle #3Local quality

2Reliability

If ion implantation is used to form p+ barrier regions to reduce reverse leakage current, then reverse leakage is reduced, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvereverse leakage currentVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The p+ barrier regions are formed by ion implantation through a patterned mask before the final device assembly. This preliminary formation of barrier regions establishes the JBS structure early in the manufacturing process, enabling subsequent steps to build upon this foundation and reducing overall manufacturing complexity.

Inventive Principle:
Principle #10Preliminary action

3Power

If the depletion region is allowed to extend to the edge of the device to maximize active area, then current handling capability is improved, but electric field crowding causes premature breakdown and reduces voltage blocking ability

Engineering Contradiction:
Improvecurrent handling capabilityVSAvoidvoltage blocking ability
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The device active area is segmented into Schottky contact regions and JBS regions. The JBS regions with p+ barrier layers are positioned at strategic locations to terminate depletion regions before they reach the device edges, preventing electric field crowding and premature breakdown while maintaining adequate current handling capability in the Schottky regions.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The JBS diode structure enhances voltage blocking capability, reduces reverse leakage currents, and maintains fast switching speeds characteristic of Schottky diodes, while providing surge current handling and improved reliability by controlling the forward voltage drop and preventing current runaway.

Implementation Method 1

A Schottky contact is formed on the drift layer and forms a Schottky junction with the drift layer

Methodology Applied
Scientific EffectSchottky junction:

Implementation Method 2

The p-type junction barrier region includes a p-type polysilicon region forming a P-N heterojunction with the drift layer

Methodology Applied
Scientific EffectP-N heterojunction:

Implementation Method 3

A guard ring termination region is formed surrounding the Schottky junction active region. The purpose of junction termination region is to reduce or prevent electric field crowding at the edges of the Schottky junction

Methodology Applied
Scientific EffectElectric field management: Electric Field

Data Source

PatentEP2754182B1Method of fabricating a heterojunction JBS diode with non-implanted barrier regions
Publication Date: 2020.08.19 WOLFSPEED INC
  • EP2754182B1 patent drawingFigure 1~2
  • EP2754182B1 patent drawingFigure 3~4
  • EP2754182B1 patent drawingFigure 5~6

AI summary

An electronic device includes a silicon carbide layer including an n-type drift region therein, a contact forming a Schottky junction with the drift region, and a p-type junction barrier region on the silicon carbide layer. The p-type junction barrier region includes a p-type polysilicon region forming a P-N heterojunction with the drift region, and the p-type junction barrier region is electrically connected to the contact.